公开(公告)号：US20060061850A1

公开(公告)日：2006-03-23

申请号：US11273772

申请日：2005-11-14

申请人： Yee-Chung Fu ,  Ting-Tung Kuo

发明人： Yee-Chung Fu ,  Ting-Tung Kuo

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

摘要翻译： 在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。 第一电极耦合到第一电压源。 第二电极耦合到第二电压源。 移动元件包括耦合到第三电压源的第三电极。 使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。 使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。 在一个实施例中，移动单元是镜子。

公开(公告)号：US07426066B2

公开(公告)日：2008-09-16

申请号：US11273772

申请日：2005-11-14

申请人： Yee-Chung Fu ,  Ting-Tung Kuo

发明人： Yee-Chung Fu ,  Ting-Tung Kuo

IPC分类号： G02B26/10

CPC分类号： G02B26/0841

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

摘要翻译： 在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。 第一电极耦合到第一电压源。 第二电极耦合到第二电压源。 移动元件包括耦合到第三电压源的第三电极。 使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。 使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。 在一个实施例中，移动单元是镜子。

公开(公告)号：US07034370B2

公开(公告)日：2006-04-25

申请号：US10302413

申请日：2002-11-22

申请人： Ting-Tung Kuo

发明人： Ting-Tung Kuo

IPC分类号： H01L27/14

CPC分类号： G02B26/0841

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

公开(公告)号：US06769616B2

公开(公告)日：2004-08-03

申请号：US10302387

申请日：2002-11-22

申请人： Yee-Chung Fu ,  Ting-Tung Kuo

发明人： Yee-Chung Fu ,  Ting-Tung Kuo

IPC分类号： G06K710

CPC分类号： G02B6/359 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3586 ,  G02B26/0841 ,  G02B26/101

摘要： In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

摘要翻译： 在本发明的一个实施例中，MEMS结构包括第一电极，第二电极和移动元件。 第一电极耦合到第一电压源。 第二电极耦合到第二电压源。 移动元件包括耦合到第三电压源的第三电极。 使用第一电极和第三电极之间的稳定的电压差来将结构的固有频率调谐到应用的扫描频率。 使用在应用的扫描频率下的第二电极和第三电极之间的振荡电压差来振荡移动元件。 在一个实施例中，移动单元是镜子。