公开(公告)号：US20130014819A1

公开(公告)日：2013-01-17

申请号：US13582499

申请日：2011-03-03

申请人： Andreas Teppe ,  Matthias Geiger ,  Reinhold Schlosser ,  Adolf Muenzer ,  Jan Schoene ,  Joerg Isenberg ,  Tino Kuehn ,  Steffen Keller

发明人： Andreas Teppe ,  Matthias Geiger ,  Reinhold Schlosser ,  Adolf Muenzer ,  Jan Schoene ,  Joerg Isenberg ,  Tino Kuehn ,  Steffen Keller

IPC分类号： H01L31/0236 ,  H01L31/18

CPC分类号： H01L31/068 ,  H01L21/02587 ,  H01L21/02675 ,  H01L21/268 ,  H01L31/1804 ,  H01L31/1872 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for doping a semiconductor substrate includes heating the semiconductor substrate by irradiation with laser radiation and at the same time diffusing dopant from a dopant source into the semiconductor substrate in heated regions. The semiconductor substrate is heated by the irradiation with laser radiation. A surface portion of the semiconductor substrate that is less than 10% of the total surface of all irradiated regions is melted and recrystallized. There is also provided a solar cell.

摘要翻译： 掺杂半导体衬底的方法包括通过用激光辐射照射加热半导体衬底，并且同时将掺杂剂从掺杂剂源扩散到加热区域中的半导体衬底中。 通过激光辐射照射来加热半导体衬底。 半导体衬底的表面部分小于所有照射区域的总表面的10％，熔化并重结晶。 还提供了太阳能电池。

公开(公告)号：US20110214727A1

公开(公告)日：2011-09-08

申请号：US13128304

申请日：2009-11-09

申请人： Ainhoa Esturo-Breton ,  Matthias Geiger ,  Steffen Keller ,  Reinhold Schlosser ,  Catharine Voyer ,  Johannes Maier ,  Martin Breselge ,  Adolf Muenzer ,  Tobias Friess ,  Tino Kuehn

发明人： Ainhoa Esturo-Breton ,  Matthias Geiger ,  Steffen Keller ,  Reinhold Schlosser ,  Catharine Voyer ,  Johannes Maier ,  Martin Breselge ,  Adolf Muenzer ,  Tobias Friess ,  Tino Kuehn

IPC分类号： H01L31/06 ,  H01L31/18

CPC分类号： H01L31/1804 ,  H01L31/022425 ,  Y02E10/547 ,  Y02P70/521

摘要： A method for manufacturing a solar cell via a two-stage doping includes the steps of forming an oxide layer, which can be penetrated by a first dopant, on at least one part of the surface of a solar cell substrate, forming an opening in the oxide layer in at least one high-doping region by removing the oxide layer in this high-doping region and diffusing the first dopant into the at least one high-doping region of the solar cell substrate through the opening. The first dopant is diffused into the solar cell substrate through the oxide layer. The diffusing-in through the openings and through the oxide layer takes place at the same time in a common diffusion step and the solar cell substrate is diffused in the common diffusion step in an at least partially hydrophilic state.

摘要翻译： 一种用于通过两级掺杂制造太阳能电池的方法包括以下步骤：在太阳能电池基板的至少一部分表面上形成可被第一掺杂剂穿透的氧化物层，从而在 通过去除该高掺杂区域中的氧化物层并将第一掺杂剂通过该开口扩散到太阳能电池基板的至少一个高掺杂区域中，在至少一个高掺杂区域中形成氧化物层。 第一掺杂剂通过氧化物层扩散到太阳能电池基板中。 通过开口和通过氧化物层的扩散在同一扩散步骤中同时进行，并且太阳能电池基板在共同的扩散步骤中以至少部分亲水的状态扩散。