公开(公告)号：US5985811A

公开(公告)日：1999-11-16

申请号：US780502

申请日：1997-01-08

申请人： Toda Masayuki ,  Tadahiro Ohmi ,  Yasuyuki Harada

发明人： Toda Masayuki ,  Tadahiro Ohmi ,  Yasuyuki Harada

IPC分类号： B08B3/10 ,  A61B19/00 ,  B08B3/12 ,  C11D3/39 ,  C11D7/00 ,  C11D11/00 ,  H01L21/304 ,  B08B3/04

CPC分类号： C11D3/3947 ,  B08B3/12 ,  C11D11/0047 ,  C11D11/007 ,  A61B90/70

摘要： A cleaning solution and cleaning method are provided which: (1) make treatment at room temperature possible, and do not require heating, (2) use little chemicals and water, (3) do not require specialized apparatuses, and moreover, (4) do not require the use of specialized chemicals. The cleaning solution of the present invention comprises pure water containing 20 ppb-100 ppb of oxygen and 2 ppb or more of nitrogen. Furthermore, the cleaning solution may comprise electrolytically ionized water containing OH.sup.- and containing 20 ppb-100 ppb of oxygen. In the cleaning method of the present invention, the cleaning of a material to be cleaned is conducted in a cleaning solution comprising pure water containing 20 ppb-100 ppb of oxygen and 2 ppb-15 ppm of nitrogen, while applying ultrasound having a frequency of 30 kHz or more. Furthermore, in the cleaning method of the present invention, the cleaning of a material to be cleaned may be conducted in a cleaning solution comprising electrolytically ionized water containing OH.sup.- and containing 20 ppb-100 ppb of oxygen, while applying ultrasound having a frequency of 30 kHz or more.

摘要翻译： 提供清洗方法和清洗方法：（1）在室温下进行处理，不需要加热，（2）少量使用化学品和水，（3）不需要专门的设备，而且（4） 不需要使用专门的化学品。 本发明的清洗液含有20ppb-100ppb的氧和2ppb以上的氮的纯水。 此外，清洁溶液可以包含含有OH-并且含有20ppb-100ppb氧的电解电离水。 在本发明的清洗方法中，要清洗的材料在包含20ppb-100ppb氧气和2ppb-15ppm氮气的纯水的清洁溶液中进行，同时施加频率为 30 kHz以上。 此外，在本发明的清洗方法中，清洗材料可以在含有OH-并含有20ppb-100ppb的氧的电解离子水的清洗溶液中进行，同时施加频率为 30 kHz以上。