公开(公告)号：US20130074615A1

公开(公告)日：2013-03-28

申请号：US13617635

申请日：2012-09-14

申请人： Mutsuo SASAKI ,  Hiroshi Igarashi ,  Tomoshi Abe

发明人： Mutsuo SASAKI ,  Hiroshi Igarashi ,  Tomoshi Abe

IPC分类号： H01L21/67 ,  G01N19/00

CPC分类号： H01L21/67265 ,  H01L21/67772

摘要： To enable appropriate wafer mapping in the case where a wafer is stored at the highest level, which is provided as a reserve, of a pod, a load port apparatus drives a mapping frame that supports a sensor by a first driving unit that drives the mapping frame in a first direction parallel to the direction along which wafers in the pod are arranged in an overlapping manner and a second driving unit that drives the mapping frame in a second direction that crosses the first direction in such a way as to form an acute angle in the side in which the sensor starts the mapping.

摘要翻译： 为了在将晶片以保留的最高级存储在晶片的情况下进行适当的晶片映射，负载端口装置通过驱动映射的第一驱动单元来驱动支持传感器的映射框架 框架沿与平行于盒中的晶片的方向平行的第一方向以重叠的方式布置;以及第二驱动单元，其以与第一方向交叉的第二方向驱动映射框，以形成锐角 在传感器开始映射的一侧。

公开(公告)号：US08234002B2

公开(公告)日：2012-07-31

申请号：US12389541

申请日：2009-02-20

申请人： Jun Emoto ,  Tomoshi Abe

发明人： Jun Emoto ,  Tomoshi Abe

IPC分类号： G06F19/00

CPC分类号： H04Q9/00

摘要： A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation of them, and a battery serving as a power source of the above elements. The controller has a sleep mode in which it causes the transmission means to transmit the data on the pressure at regular intervals and an active mode in which it causes the transmission means to transmit the data on the pressure when necessary in response to an externally supplied command. By the above described configuration, the pressure in the interior of the container can be checked appropriately.

摘要翻译： 在其中储存和保存标线片等的密闭容器设置有压力传感器，用于传送压力数据的传输装置，控制其操作的控制器和用作上述元件的电源的电池 。 控制器具有睡眠模式，其中它使得传输装置以规则的间隔传送压力上的数据，以及活动模式，其中它使得传输装置响应于外部提供的命令在必要时传送关于压力的数据 。 通过上述结构，可以适当地检查容器内部的压力。

公开(公告)号：US20090211940A1

公开(公告)日：2009-08-27

申请号：US12389541

申请日：2009-02-20

申请人： Jun Emoto ,  Tomoshi Abe

发明人： Jun Emoto ,  Tomoshi Abe

IPC分类号： B65D85/00 ,  H01H43/00 ,  G08C19/00

CPC分类号： H04Q9/00

摘要： A closed container in which a reticle etc. is stored and kept is provided with a pressure sensor, transmission means for transmitting data on the pressure, a controller that controls the operation of them, and a battery serving as a power source of the above elements. The controller has a sleep mode in which it causes the transmission means to transmit the data on the pressure at regular intervals and an active mode in which it causes the transmission means to transmit the data on the pressure when necessary in response to an externally supplied command. By the above described configuration, the pressure in the interior of the container can be checked appropriately.

摘要翻译： 在其中储存和保存标线片等的密闭容器设置有压力传感器，用于传送压力数据的传输装置，控制其操作的控制器和用作上述元件的电源的电池 。 控制器具有睡眠模式，其中它使得传输装置以规则的间隔传送压力上的数据，以及活动模式，其中它使得传输装置响应于外部提供的命令在必要时传送关于压力的数据 。 通过上述结构，可以适当地检查容器内部的压力。

公开(公告)号：US20090035100A1

公开(公告)日：2009-02-05

申请号：US12174852

申请日：2008-07-17

申请人： Tsutomu OKABE ,  Jun Emoto ,  Tomoshi Abe

发明人： Tsutomu OKABE ,  Jun Emoto ,  Tomoshi Abe

IPC分类号： H01L21/67

CPC分类号： H01L21/67772

摘要： A partial pressure of oxidizing gas in an opened state FOUP fixed in a FIMS system is reduced when the FOUP is closed. Purge gas supply nozzles are placed outside of two vertical sides of an opening portion (10) within the FIMS. A curtain nozzle is additionally installed which can form a gas curtain from purge gas above the top side of the opening portion (10). When a pod (2) is closed with a lid (4), a door opening/closing mechanism keeps the lid (4) at a given angle with respect to the flowing direction of curtain gas for a given period of time, and hence purge gas supplied to the gas curtain is additionally put into use for the purging of the interior of the pod by the lid 4.

摘要翻译： 当FOUP关闭时，固定在FIMS系统中的打开状态FOUP中的氧化气体的分压降低。 吹扫气体供应喷嘴放置在FIMS内的开口部分（10）的两个垂直侧的外侧。 还安装了一个窗帘喷嘴，其可以在开口部分（10）的顶侧上方的吹扫气体形成气幕。 当盖子（2）用盖子（4）关闭时，门打开/关闭机构将盖子（4）相对于帘式气体的流动方向保持给定的角度一段给定的时间，并因此吹扫 供给气幕的气体另外投入使用，以通过盖4清除荚的内部。

公开(公告)号：US09324595B2

公开(公告)日：2016-04-26

申请号：US13617635

申请日：2012-09-14

申请人： Mutsuo Sasaki ,  Hiroshi Igarashi ,  Tomoshi Abe

发明人： Mutsuo Sasaki ,  Hiroshi Igarashi ,  Tomoshi Abe

IPC分类号： H01L21/67 ,  H01L21/677

CPC分类号： H01L21/67265 ,  H01L21/67772

摘要： To enable appropriate wafer mapping in the case where a wafer is stored at the highest level, which is provided as a reserve, of a pod, a load port apparatus drives a mapping frame that supports a sensor by a first driving unit that drives the mapping frame in a first direction parallel to the direction along which wafers in the pod are arranged in an overlapping manner and a second driving unit that drives the mapping frame in a second direction that crosses the first direction in such a way as to form an acute angle in the side in which the sensor starts the mapping.

摘要翻译： 为了在将晶片以保留的最高级存储在晶片的情况下进行适当的晶片映射，负载端口装置通过驱动映射的第一驱动单元来驱动支持传感器的映射框架 框架沿与平行于盒中的晶片的方向平行的第一方向以重叠的方式布置;以及第二驱动单元，其以与第一方向交叉的第二方向驱动映射框，以形成锐角 在传感器开始映射的一侧。

公开(公告)号：US08302637B2

公开(公告)日：2012-11-06

申请号：US12174852

申请日：2008-07-17

申请人： Tsutomu Okabe ,  Jun Emoto ,  Tomoshi Abe

发明人： Tsutomu Okabe ,  Jun Emoto ,  Tomoshi Abe

IPC分类号： B65B1/04

CPC分类号： H01L21/67772

摘要： A partial pressure of oxidizing gas in an opened state FOUP fixed in a FIMS system is reduced when the FOUP is closed. Purge gas supply nozzles are placed outside of two vertical sides of an opening portion (10) within the FIMS. A curtain nozzle is additionally installed which can form a gas curtain from purge gas above the top side of the opening portion (10). When a pod (2) is closed with a lid (4), a door opening/closing mechanism keeps the lid (4) at a given angle with respect to the flowing direction of curtain gas for a given period of time, and hence purge gas supplied to the gas curtain is additionally put into use for the purging of the interior of the pod by the lid 4.

摘要翻译： 当FOUP关闭时，固定在FIMS系统中的打开状态FOUP中的氧化气体的分压降低。 吹扫气体供应喷嘴放置在FIMS内的开口部分（10）的两个垂直侧的外侧。 还安装了一个窗帘喷嘴，其可以在开口部分（10）的顶侧上方的吹扫气体形成气幕。 当盖子（2）用盖子（4）关闭时，门打开/关闭机构将盖子（4）相对于帘式气体的流动方向保持给定的角度一段给定的时间，并因此吹扫 供给气幕的气体另外投入使用，以通过盖4清除荚的内部。