公开(公告)号：US06553787B1

公开(公告)日：2003-04-29

申请号：US09701427

申请日：2001-02-05

申请人： Kazuhiro Akiho ,  Masaki Kusuhara ,  Hiroyuki Watanabe ,  Tomoyasu Uno

发明人： Kazuhiro Akiho ,  Masaki Kusuhara ,  Hiroyuki Watanabe ,  Tomoyasu Uno

IPC分类号： C03B1901

CPC分类号： C03B19/095 ,  C30B15/10 ,  C30B35/002 ,  Y02P40/57 ,  Y10S65/04

摘要： Present invention suppresses undesirable effects of the bubbles trapped in a silica glass crucible on single crystallization during the pulling process under a high-temperature load. When raw material powder is melted in a mold 1, graphite components of electrodes and impurities contained in the raw material are removed by introducing hydrogen gas and/or oxygen gas immediately after the start of arc discharge. Graphite and impurities are prevented from entering the product crucible, thereby suppressing the volume increase rate of the bubbles and reducing the inner pressure of the bubbles. Gases remaining in voids of an accumulated layer of silica powder formed inside the mold 1 can be replaced with helium gas, by supplying helium gas to the accumulated layer from the mold 1.

摘要翻译： 本发明在高温负载下，在牵引过程中抑制了在二氧化硅玻璃坩埚中捕获的气泡对单结晶的不良影响。 当原料粉末在模具1中熔化时，通过在电弧放电开始之后立即引入氢气和/或氧气来除去原料中包含的电极和杂质的石墨成分。 防止石墨和杂质进入产品坩埚，从而抑制气泡的体积增加率并降低气泡的内部压力。 残留在模具1内部形成的二氧化硅粉末的空隙中的气体可以用氦气代替，通过从模具1向积聚层供给氦气。