Abstract:
The in-situ micro-spectro-sensor determines whether a leakage occurs during the plasma process by taking the advantage of detecting the target leak in gas specifically composed of 99% of nitrogen and oxygen which are four to one in ratio. Warning signals with light and sound are available. The main part is compact, small and set up is quite convenient. Non-invasive in-situ detection has no effect on in-line process, but can indeed breakthrough the in-situ leak detection barrier for plasma-based process facilities of high-tech industries such as semiconductors and opto-electronics.
Abstract:
The present invention provides a light-enhancing component and a fabrication method thereof by using the focused-ion-beam. In the present invention, the surface plasmon polariton structure is coated on the surface of the optical fiber so as to form the light-enhancing component. When the light passes through the optical fiber, the luminous flux transmitted through the aperture on the surface plasmon polariton is enhanced, and the light beam smaller than the diffraction limitation can be transmitted to the far-field, i.e. the nano-optic sword is formed. The light-enhancing component of the present invention can be used for the optical data storage, the optical microscopy, the biomedical detections and the lithography to perform the extra optical resolutions beyond the diffraction limitation.
Abstract:
A verification method and a verification system are disclosed. The verification method is applicable to an electronic device including a system memory and a BIOS memory provided with a Pre-Boot Authentication (PBA) application and prescribed biometric data. In one embodiment, the verification method comprises the steps of executing a BIOS process to load the operation code (OPCode) or the BIOS driver of the BIOS from the BIOS memory to the system memory to establish a communication channel between the electronic device and a biometric device; loading the PBA application to the system memory for running; loading the prescribed biometric data to the system to compare with biometric data acquired by the biometric data capture device; and requesting the BIOS to load an operation system when the comparing result is matched.