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公开(公告)号:US09057130B2
公开(公告)日:2015-06-16
申请号:US13473663
申请日:2012-05-17
申请人: Steffen Mosshammer , Reinhardt Bauer , Thomas Meyer , Matthias Smolke , Michael Hofmann , Torsten Dsaak
发明人: Steffen Mosshammer , Reinhardt Bauer , Thomas Meyer , Matthias Smolke , Michael Hofmann , Torsten Dsaak
IPC分类号: C23C16/50 , C23C16/00 , C23F1/00 , H01L21/306 , C23C14/56
CPC分类号: C23C14/562
摘要: A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.
摘要翻译: 用于基板的真空处理的输送圆筒包括辊体和布置在辊体上并包封辊体的至少一个间隔元件。 间隔元件由包含金属或/和金属线的针织管制成。
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公开(公告)号:US20120292289A1
公开(公告)日:2012-11-22
申请号:US13473663
申请日:2012-05-17
申请人: Steffen MOSSHAMMER , Reinhardt BAUER , Thomas MEYER , Matthias SMOLKE , Michael HOFMANN , Torsten DSAAK
发明人: Steffen MOSSHAMMER , Reinhardt BAUER , Thomas MEYER , Matthias SMOLKE , Michael HOFMANN , Torsten DSAAK
CPC分类号: C23C14/562
摘要: A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.
摘要翻译: 用于基板的真空处理的输送圆筒包括辊体和布置在辊体上并包封辊体的至少一个间隔元件。 间隔元件由包含金属或/和金属线的针织管制成。
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