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公开(公告)号：US09057130B2
公开(公告)日：2015-06-16
申请号：US13473663
申请日：2012-05-17
申请人： Steffen Mosshammer , Reinhardt Bauer , Thomas Meyer , Matthias Smolke , Michael Hofmann , Torsten Dsaak
发明人： Steffen Mosshammer , Reinhardt Bauer , Thomas Meyer , Matthias Smolke , Michael Hofmann , Torsten Dsaak
IPC分类号： C23C16/50 , C23C16/00 , C23F1/00 , H01L21/306 , C23C14/56
CPC分类号： C23C14/562
摘要： A transport cylinder for the vacuum treatment of substrates includes a roll body and at least one spacer element arranged on the roll body and enveloping the roll body. The spacer element is made of a knitted tube containing metallic or/and metallic threads.
摘要翻译： 用于基板的真空处理的输送圆筒包括辊体和布置在辊体上并包封辊体的至少一个间隔元件。 间隔元件由包含金属或/和金属线的针织管制成。
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2.发明授权公开(公告)号：US08069974B2
公开(公告)日：2011-12-06
申请号：US12169966
申请日：2008-07-09
申请人： Reinhardt Bauer , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
发明人： Reinhardt Bauer , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
IPC分类号： B65G43/00
CPC分类号： B65G43/04
摘要： In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.
摘要翻译： 在包括围绕至少两个引导辊引导的至少一个环形输送机的输送装置中，用于监测导辊运动的监控装置被定位在至少一个导辊上。 监控装置包括设置在引导辊上并与导向辊电连接的第一接触元件和设置在引导辊附近的第二接触元件。 第一和第二接触元件相对于彼此布置，使得它们之间的电接触发生在导辊的每转一圈，使得导向辊的电位传递到第二接触元件。 另外，公开了一种包括该输送装置的基板处理装置。
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3.发明申请TRANSPORT DEVICE WITH A MONITORING APPLIANCE AND SUBSTRATE TREATMENT APPARATUS 失效具有监控装置和底板处理装置的运输装置公开(公告)号：US20090014285A1
公开(公告)日：2009-01-15
申请号：US12169966
申请日：2008-07-09
申请人： Reinhardt BAUER , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
发明人： Reinhardt BAUER , Johannes Struempfel , Andreas Heisig , Matthias Smolke , Thomas Posseckardt , Frank Hupka
IPC分类号： B65G43/02
CPC分类号： B65G43/04
摘要： In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.
摘要翻译： 在包括围绕至少两个引导辊引导的至少一个环形输送机的输送装置中，用于监测导辊运动的监控装置被定位在至少一个导辊上。 监控装置包括设置在引导辊上并与导向辊电连接的第一接触元件和设置在引导辊附近的第二接触元件。 第一和第二接触元件相对于彼此布置，使得它们之间的电接触发生在导辊的每转一圈，使得导向辊的电位传递到第二接触元件。 另外，公开了一种包括该输送装置的基板处理装置。
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公开(公告)号：US20130139750A1
公开(公告)日：2013-06-06
申请号：US13700811
申请日：2011-06-14
IPC分类号： B05C9/08
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并具有与至少第二模块相同的外部接口。
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公开(公告)号：US09186694B2
公开(公告)日：2015-11-17
申请号：US13700811
申请日：2011-06-14
CPC分类号： B05C9/08 , C23C14/56 , C23C14/568
摘要： A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
摘要翻译： 模块化建筑真空涂覆系统包括多个功能室，沿着纵向范围一个接一个地布置，其中基板通过基板传送区域中的室移动。 为了降低与供应媒体有关的与生产有关的和与安装相关的费用，作为第一子模块的功能室被布置在第一模块中并且具有与至少第二模块相同的外部接口。
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