公开(公告)号：US06278113B1

公开(公告)日：2001-08-21

申请号：US09166790

申请日：1998-10-06

申请人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

发明人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

IPC分类号： H01J3720

CPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q30/06 ,  H01J2237/20221 ,  Y10S977/872

摘要： A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.

摘要翻译： 扫描探针显微镜设置有指向样品表面的探针尖端，用于提供样品和探针尖端之间的相对位置变化的XYZ精细运动机构，以及用于检测探针尖端的位移的位移检测部。 扫描探针显微镜通过使用控制信号测量样品的表面特性。 该控制信号是从位移检测部输出的信号生成的，并且用于保持样品与探针尖端之间产生的相互作用的状态与预定状态相同，同时探针尖端基于样品的表面扫描 关于XYZ精细机芯的操作。 此外，它包括布置在显微镜载物台的标准表面上的移动部分，其具有在上表面上的样品并且基于静压导向件沿着标准表面移动;高度位置控制部分，用于选择性地供应高压 流体移动到移动部分，以便执行静压引导件并将移动部分的高度位置控制到标准表面;以及致动机构，用于沿平行于标准表面的方向移动移动部分。