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    Scanning probe microscope
    1.
    发明授权
    Scanning probe microscope 失效
    扫描探针显微镜

    公开(公告)号：US06278113B1

    公开(公告)日：2001-08-21

    申请号：US09166790

    申请日：1998-10-06

    申请人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

    发明人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

    IPC分类号： H01J3720

    CPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q30/06 ,  H01J2237/20221 ,  Y10S977/872

    摘要： A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.

    摘要翻译： 扫描探针显微镜设置有指向样品表面的探针尖端，用于提供样品和探针尖端之间的相对位置变化的XYZ精细运动机构，以及用于检测探针尖端的位移的位移检测部。 扫描探针显微镜通过使用控制信号测量样品的表面特性。 该控制信号是从位移检测部输出的信号生成的，并且用于保持样品与探针尖端之间产生的相互作用的状态与预定状态相同，同时探针尖端基于样品的表面扫描 关于XYZ精细机芯的操作。 此外，它包括布置在显微镜载物台的标准表面上的移动部分，其具有在上表面上的样品并且基于静压导向件沿着标准表面移动;高度位置控制部分，用于选择性地供应高压 流体移动到移动部分，以便执行静压引导件并将移动部分的高度位置控制到标准表面;以及致动机构，用于沿平行于标准表面的方向移动移动部分。

    Fine movement mechanism unit and scanning probe microscope
    2.
    发明授权
    Fine movement mechanism unit and scanning probe microscope 失效
    精细运动机构单元和扫描探针显微镜

    公开(公告)号：US06229607B1

    公开(公告)日：2001-05-08

    申请号：US09182048

    申请日：1998-10-29

    申请人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

    发明人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

    IPC分类号： G01B1114

    CPC分类号： G01Q10/04 ,  Y10S977/87

    摘要： A fine movement mechanism unit is configured by a supporting member, two fixed sections fixed to this supporting member, two pairs of parallel-plate flexural sections disposed between the two fixed sections, an X fine movement mechanism, a Y fine movement mechanism, and a Z fine movement mechanism. The X fine movement mechanism has an X moving section movable in an X direction, connected to each of the two fixed sections through the two pairs of parallel-plate flexural sections, and two X direction piezoelectric actuators causing the X moving section to move. The Y fine movement mechanism arranged to the X moving section, has other two pairs of parallel-plate flexural sections, a Y moving section movable in the Y direction, connected to the X moving section through the other two pairs of parallel-plate flexural sections, and two Y direction piezoelectric actuators causing the Y moving section to move relatively to the X moving section. The Z fine movement mechanism arranged to the Y moving section, has a Z moving section movable in a Z direction perpendicular to both of the X and Y directions, and a Z direction piezoelectric actuator causing the Z moving section to move.

    摘要翻译： 精细运动机构单元由支撑构件构成，固定在该支撑构件上的两个固定部，设置在两个固定部之间的两对平行板弯曲部，X微移动机构，Y细移动机构和 Z精细机芯。 X精细机构具有可沿X方向移动的X移动部，通过两对平行板弯曲部连接到两个固定部中的每一个，以及使X移动部移动的两个X方向压电致动器。 设置在X移动部分上的Y细移动机构具有其他两对平行板弯曲部分，Y方向移动的Y移动部分，通过另外两对平行板弯曲部分连接到X移动部分 以及两个Y方向的压电致动器，其使Y移动部相对于X移动部移动。 配置在Y移动部上的Z细移动机构具有能够沿与X方向和Y方向垂直的Z方向移动的Z移动部，Z方向的压电致动器使Z移动部移动。

    Scanning probe microscope with the stage unit
    3.
    发明授权
    Scanning probe microscope with the stage unit 失效
    扫描探针显微镜与舞台单元

    公开(公告)号：US06184533B2

    公开(公告)日：2001-02-06

    申请号：US09166850

    申请日：1998-10-06

    申请人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

    发明人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

    IPC分类号： H01J3720

    CPC分类号： G01Q10/02 ,  Y10S977/872

    摘要： A stage unit used for moving a sample comprises a vertical stage for moving a sample stand in a vertical direction, a horizontal stage for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.

    摘要翻译： 用于移动样品的平台单元包括用于沿垂直方向移动样品台的垂直平台，用于沿垂直方向移动垂直平台的水平台。 在舞台单元中，水平台被固定在表台的水平滑动表面上，并且垂直平台可滑动地布置在滑动表面上。 垂直平台通过在水平方向上具有强刚性和垂直方向的弱刚性的板簧与水平台相结合。 舞台装置的整体刚度仅由垂直平台确定，并且不受包括在水平台中的部分的刚度和驱动部分对于每个轴线方向的刚性的影响。 可以增加舞台装置的刚度。 舞台装置的静止刚度仅由垂直舞台的刚度决定。 舞台单元的所有阶段都不堆积。 因此，台架单元的高度尽可能地降低。

    Scanning probe microscope and measurement method using the same
    7.
    发明授权
    Scanning probe microscope and measurement method using the same 失效
    扫描探针显微镜和测量方法使用相同

    公开(公告)号：US07333191B2

    公开(公告)日：2008-02-19

    申请号：US10893364

    申请日：2004-07-19

    申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

    IPC分类号： G01B1/00

    CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

    摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

    摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

    Probe replacement method for scanning probe microscope
    8.
    发明申请
    Probe replacement method for scanning probe microscope 审中-公开
    用于扫描探针显微镜的探头更换方法

    公开(公告)号：US20070180889A1

    公开(公告)日：2007-08-09

    申请号：US10565509

    申请日：2004-03-22

    申请人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    发明人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

    IPC分类号： G12B21/00 ,  G01N13/10

    CPC分类号： G01Q10/06 ,  G01Q30/06 ,  G01Q70/02

    摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

    摘要翻译： 一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。 在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。 在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。 在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。