公开(公告)号：US20070034508A1

公开(公告)日：2007-02-15

申请号：US11200062

申请日：2005-08-10

Applicant: Geeng-Jen Sheu ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Chien-Ming Li ,  Hsin-Lun Wu

Inventor： Geeng-Jen Sheu ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Chien-Ming Li ,  Hsin-Lun Wu

IPC: C23C14/00

CPC classification number: C23C14/56 ,  C23C14/568 ,  Y10T74/19623 ,  Y10T74/19633 ,  Y10T74/1967

Abstract: A transmission system includes two or more independent chambers, in each of which shafts with gears thereon are provided for rolling in synchronous motion, and a carrier with adjustable gear devices on a bottom thereof. Each of the adjustable gear devices has a base, a movable rack member, vertical springs and horizontal springs. The movable rack member is connected to the base to be moved along a horizontal direction. The vertical springs are provided between the base and the carrier to urge the adjustable gear device along a vertical direction. The movable rack member has a rack portion to be meshed with the gears of the shafts, such that the carrier is moved by the gears to cross the chambers. With the movement of the movable rack member both along the horizontal and the vertical direction, the carrier is transported in a smooth, synchronous, skid-proof, stable and real-time motion during the crossing chamber process.

Abstract translation: 传动系统包括两个或更多个独立的腔室，每个腔室中的齿轮上设有用于同步运动的滚动件，以及在其底部具有可调齿轮装置的载体。 每个可调齿轮装置具有基座，可动齿条构件，垂直弹簧和水平弹簧。 可移动的齿条构件连接到基座以沿水平方向移动。 垂直弹簧设置在基座和托架之间，以沿垂直方向推动可调齿轮装置。 可移动齿条构件具有与轴的齿轮啮合的齿条部分，使得托架通过齿轮移动以跨过腔室。 随着可移动齿条构件沿着水平和垂直方向的移动，载体在交叉腔室过程中以平滑，同步，防滑，稳定和实时的运动传送。

公开(公告)号：US20060157345A1

公开(公告)日：2006-07-20

申请号：US11331034

申请日：2006-01-13

Applicant: Tai-Yuan Huang ,  Hsueh-Chiung Liao ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Yuan-Chi Lee ,  Geeng-Jen Sheu

Inventor： Tai-Yuan Huang ,  Hsueh-Chiung Liao ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Yuan-Chi Lee ,  Geeng-Jen Sheu

IPC: C23C14/00

CPC classification number: C23C14/564 ,  C23C14/56

Abstract: An in-line coating/sputtering system includes a clean region with an internal static electricity/dust removal apparatus and an elevator device therein. A loading region has a pressure-down chamber with two gates on opposite ends thereof, one of which is communicated with the clean region. A coating/sputtering region has a vacuum chamber with two gates on opposite ends thereof, one of which is communicated with the pressure-down chamber of the loading region. An unloading region has a pressure-up chamber with two gates on opposite ends thereof, one of which is communicated with the vacuum chamber of the coating/sputtering region. A rear reversible region has an open chamber communicated with the pressure-up chamber of the unloading region, in which an elevator device is provided. A return region having a channel connecting the rear reversible region and the clean region, in which a backward transmission device is provided.

Abstract translation: 在线涂布/溅射系统包括具有内部静电/除尘装置的清洁区域和其中的电梯装置。 装载区域具有在其相对端上具有两个闸门的压力下降室，其中一个与清洁区域连通。 涂覆/溅射区域具有在其相对端上具有两个栅极的真空室，其中一个与负载区域的压力下降室连通。 卸载区域具有在其相对端上具有两个闸门的升压室，其中一个与涂覆/溅射区域的真空室连通。 后部可逆区域具有与卸载区域的升压室连通的开放室，其中设置有电梯装置。 具有连接后部可逆区域和清洁区域的通道的返回区域，其中设置有反向传输装置。

公开(公告)号：US07669498B2

公开(公告)日：2010-03-02

申请号：US11200062

申请日：2005-08-10

Applicant: Geeng-Jen Sheu ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Chien-Ming Li ,  Hsin-Lun Wu

Inventor： Geeng-Jen Sheu ,  Tuan-Jen Yu ,  Chung-Chung Liu ,  Chien-Ming Li ,  Hsin-Lun Wu

IPC: F16H1/04

CPC classification number: C23C14/56 ,  C23C14/568 ,  Y10T74/19623 ,  Y10T74/19633 ,  Y10T74/1967

Abstract: A transmission system includes two or more independent chambers, in each of which shafts with gears thereon are provided for rolling in synchronous motion, and a carrier with adjustable gear devices on a bottom thereof. Each of the adjustable gear devices has a base, a movable rack member, vertical springs and horizontal springs. The movable rack member is connected to the base to be moved along a horizontal direction. The vertical springs are provided between the base and the carrier to urge the adjustable gear device along a vertical direction. The movable rack member has a rack portion to be meshed with the gears of the shafts, such that the carrier is moved by the gears to cross the chambers. With the movement of the movable rack member both along the horizontal and the vertical direction, the carrier is transported in a smooth, synchronous, skid-proof, stable and real-time motion during the crossing chamber process.

Abstract translation: 传动系统包括两个或更多个独立的腔室，每个腔室中的齿轮上设有用于同步运动的滚动件，以及在其底部具有可调齿轮装置的载体。 每个可调齿轮装置具有基座，可动齿条构件，垂直弹簧和水平弹簧。 可移动的齿条构件连接到基座以沿水平方向移动。 垂直弹簧设置在基座和托架之间，以沿垂直方向推动可调齿轮装置。 可移动齿条构件具有与轴的齿轮啮合的齿条部分，使得托架通过齿轮移动以跨过腔室。 随着可移动齿条构件沿着水平和垂直方向的移动，载体在交叉腔室过程中以平滑，同步，防滑，稳定和实时的运动传送。