公开(公告)号：US06941811B2

公开(公告)日：2005-09-13

申请号：US10633414

申请日：2003-08-04

申请人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Tun Yuan Lo

发明人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Tun Yuan Lo

IPC分类号： G01N29/07 ,  G01N29/22 ,  G01N29/44 ,  G01N29/10

CPC分类号： G01N29/223 ,  G01N29/07 ,  G01N29/44 ,  G01N2291/0237 ,  G01N2291/044 ,  G01N2291/2697 ,  G01N2291/2698

摘要： The present invention provides an apparatus for detecting flaws in a wafer. The apparatus has a detection platform for holding a wafer positioned thereon, a cross-bar ultrasonic detection device positioned above the detection platform for emitting and receiving an ultrasonic wave reflected by a wafer; and a microprocessor for processing the reflected ultrasonic and transmits to a monitor.

公开(公告)号：US06719617B2

公开(公告)日：2004-04-13

申请号：US10348696

申请日：2003-01-22

申请人： Tun-Yuan Lo ,  Chih-Pin Hsu ,  Chih-Kun Chen

发明人： Tun-Yuan Lo ,  Chih-Pin Hsu ,  Chih-Kun Chen

IPC分类号： B24B100

CPC分类号： B24B37/04 ,  B01F7/00758 ,  B01F7/163 ,  B24B57/02

摘要： A slurry homogenizer. A frame having an outlet is disposed on a driving means having a rotating shaft. A waterproof plate having a first opening is disposed in the frame and on the driving means. Part of the shaft penetrates the first opening. A filter is disposed in the frame and on the plate. A first grinding pad has a second opening and is fitted on the shaft through the second opening. The first grinding pad is disposed in the frame and above the plate. A knob is fitted on the top of the shaft. The knob fixes the first grinding pad on the shaft. A cover having a pipe is disposed on the frame. A second grinding pad having a third opening is fitted on the pipe and disposed in the frame. The second grinding pad and the first grinding pad are separated by a fixed distance.

摘要翻译： 浆料均化器。 具有出口的框架设置在具有旋转轴的驱动装置上。 具有第一开口的防水板设置在框架中和驱动装置上。 轴的一部分穿过第一个开口。 过滤器设置在框架和板上。 第一研磨垫具有第二开口并通过第二开口装配在轴上。 第一研磨垫设置在框架中并在板上方。 在轴的顶部安装一个旋钮。 旋钮将第一个研磨垫固定在轴上。 具有管子的盖子设置在框架上。 具有第三开口的第二研磨垫安装在管上并且设置在框架中。 第二研磨垫和第一研磨垫分开一定距离。