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公开(公告)号：US06829418B2
公开(公告)日：2004-12-07
申请号：US09955120
申请日：2001-09-19
IPC分类号： G02B626
CPC分类号： G02B6/12011 , G02B6/12014 , G02B6/1203
摘要： An optical waveguide circuit device strong in impact strength in dropping, etc. is provided. A waveguide pattern is formed on a silicon substrate in this optical waveguide circuit device. For example, this waveguide pattern has an optical input waveguide, a first slab waveguide, an arrayed waveguide including a plurality of channel waveguides having lengths different from each other and arranged side by side, a second slab waveguide, and a plurality of optical output waveguides arranged side by side. The first slab waveguide is separated on a cross separating face crossing an optical path passing the first slab waveguide. A temperature dependence in light transmission central wavelength of an arrayed waveguide grating is reduced by sliding and moving a separating slab waveguide side by a slide moving member along the separating face depending on temperature. The cross separating face and a noncross separating face communicated with this cross separating face are set to faces not conformed to a cleavage plane of the substrate.
摘要翻译： 提供了一种在下降时具有强冲击强度的光波导电路装置。 在该光波导路电路装置中，在硅基板上形成波导图案。 例如，该波导图案具有光输入波导，第一平板波导，包括具有彼此长度不同并且并排布置的多个通道波导的阵列波导，第二平板波导和多个光输出波导 并排排列 第一平板波导在交叉穿过第一平板波导的光路的交叉分离面上分离。 阵列波导光栅的透光中心波长的温度依赖性通过滑动移动部件沿着分离面滑动并移动，根据温度而减小。 交叉分离面和与该交叉分离面连通的非交叉分离面被设定为不符合基板的解理面。
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公开(公告)号：US06591044B2
公开(公告)日：2003-07-08
申请号：US09961371
申请日：2001-09-25
IPC分类号： G02B610
CPC分类号： G02B6/12014 , G02B6/12023 , G02B6/1203 , G02B6/126
摘要： An optical waveguide circuit module of the invention is a highly reliable optical waveguide circuit module where cracks are not generated in an optical waveguide circuit chip housed even under a high temperature and high humidity environment. An optical waveguide circuit chip (25) comprises a waveguide forming region (10) formed on a substrate (1). The waveguide forming region (10) has a waveguide configuration sequentially connecting optical input waveguides (2), a first slab waveguide (3), an arrayed waveguide (4) made of a plurality of channel waveguides (4a) arranged side by side, the channel waveguides having a different length each other, a second slab waveguide (5), and a plurality of optical output waveguides (6) arranged side by side.
摘要翻译： 本发明的光波导电路模块是即使在高温高湿环境下也容纳的光波导电路芯片中也不产生裂纹的高可靠性的光波导路模块。 光波导电路芯片（25）包括形成在基板（1）上的波导形成区域（10）。 波导形成区域（10）具有顺序地连接光输入波导（2），第一平板波导（3），由并排布置的多个通道波导（4a）构成的阵列波导（4）的波导结构， 具有彼此不同长度的通道波导，第二平板波导（5）和并排布置的多个光学输出波导（6）。
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公开(公告)号：US06668116B2
公开(公告)日：2003-12-23
申请号：US09904847
申请日：2001-07-16
IPC分类号： G08B0600
CPC分类号： G02B6/12014 , G02B6/1203
摘要： An arrayed waveguide grating type optical multiplexer/demultiplexer of the invention eliminates the temperature dependency of the light transmission center wavelengths and suppresses an increase in insertion loss with a simple configuration even under the conditions of high temperature and high humidity. A waveguide forming area comprising an optical input waveguide, a first slab waveguide, an arrayed waveguide formed of a plurality of channel waveguides arranged side by side having a different length each other, and a plurality of optical output waveguides connected one by one is formed on a substrate. For example, the first slab waveguide is separated at crossed separation planes that cross the path of light passing through the first slab waveguide. On the crossed separation planes, a matching grease is applied. A thin film member for covering the area arranged with the matching grease is disposed to suppress the evaporation of the matching grease.
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