公开(公告)号：US20110094546A1

公开(公告)日：2011-04-28

申请号：US12620338

申请日：2009-11-17

申请人： John Valcore ,  Valeriy Litvak ,  Christine Cyterski

发明人： John Valcore ,  Valeriy Litvak ,  Christine Cyterski

IPC分类号： B08B3/00

CPC分类号： H01L21/67259 ,  H01L21/67028 ,  H01L21/67253

摘要： An aspect of the present invention provides a system and method for controlling a wafer cleaning system having a wafer carrier and a driving portion. The wafer carrier can move along a path in a first direction and a second direction. The driving portion can controllably move the wafer carrier in the first direction and the second direction. The control system includes a vibration sensor portion and a wafer carrier position controller. The vibration sensor portion can detect vibration of the wafer carrier and can output a vibration signal based on the detected vibration. The wafer carrier position controller can instruct the driving portion to modify motion of the wafer carrier based on the vibration signal to reduce the detected vibration.

摘要翻译： 本发明的一个方面提供一种用于控制具有晶片载体和驱动部分的晶片清洁系统的系统和方法。 晶片载体可沿第一方向和第二方向的路径移动。 驱动部分可以在第一方向和第二方向上可控地移动晶片载体。 控制系统包括振动传感器部分和晶片载体位置控制器。 振动传感器部分可以检测晶片载体的振动，并且可以基于检测到的振动输出振动信号。 晶片载体位置控制器可以指示驱动部分基于振动信号修改晶片载体的运动，以减少检测到的振动。

公开(公告)号：US20050048436A1

公开(公告)日：2005-03-03

申请号：US10928125

申请日：2004-08-30

申请人： Udi Fishman ,  Tal Morr ,  Joellen Fishman ,  Valeriy Litvak

发明人： Udi Fishman ,  Tal Morr ,  Joellen Fishman ,  Valeriy Litvak

IPC分类号： A61C13/15 ,  A61C17/02 ,  A61C17/022 ,  A61C17/00 ,  A61C3/00

CPC分类号： A61C17/02 ,  A61C5/62 ,  A61C17/0217 ,  A61C17/022 ,  A61C19/004

摘要： A handpiece apparatus and/or method for dispensing media, and that can include one or more lights for illumination and/or for curing of composite materials. The handpiece apparatus includes a heat source with a flow diverter to enhance heat transfer to the media, and a temperature controller that synchronizes the heat source with the fluid and/or gaseous flow. The handpiece apparatus has an accumulator chamber that temporarily removes transient flow that has not reached a predetermined temperature and then gradually recirculates it back into the media flow after the media reaches a predetermined temperature so that the media is dispensed at an elevated and uniform temperature. The handpiece apparatus can have one or more light sources for illumination and/or for curing composite materials. The handpiece apparatus dispensing nozzle acts as a light pipe to direct and focus illumination from an internal light source onto the work area.

摘要翻译： 用于分配介质的机头装置和/或方法，并且其可以包括用于照明和/或固化复合材料的一个或多个灯。 手持式设备包括具有分流器的热源以增强对介质的热传递，以及使热源与流体和/或气流同步的温度控制器。 手持式设备具有一个储存室，其临时消除尚未达到预定温度的瞬时流量，然后在介质达到预定温度之后逐渐将其循环回到介质流中，使得介质在升高且均匀的温度下分配。 手持设备可以具有用于照明和/或固化复合材料的一个或多个光源。 手持式设备分配喷嘴用作光管，以将来自内部光源的照明引导和聚焦到工作区域上。