公开(公告)号：US20080299301A1

公开(公告)日：2008-12-04

申请号：US12154539

申请日：2008-05-23

申请人： Hirotaka Sone ,  Wataru Omuro ,  Mitsuharu Muta ,  Katsuya Yamamoto

发明人： Hirotaka Sone ,  Wataru Omuro ,  Mitsuharu Muta ,  Katsuya Yamamoto

IPC分类号： B05D5/12

CPC分类号： H01L51/5206 ,  H01L51/5237

摘要： The present invention discloses a method for processing a substrate on which transparent electrode made of metal oxide is formed before forming an organic EL element on the transparent electrode. According to the method, the substrate is accommodated in a bake chamber provided with a heater. The substrate is heated while mixed gas of oxygen and nitrogen is introduced into the bake chamber so as to replace the gas in the bake chamber. The mixed gas is introduced into the bake chamber in an amount that is 1/60 or more and 1/15 or less of a whole volume of the bake chamber per minute. According to this method, moisture is removed and an appropriate surface treatment is performed for the transparent electrode of metal oxide at the same time.

摘要翻译： 本发明公开了在透明电极上形成有机EL元件之前，在其上形成由金属氧化物构成的透明电极的基板的处理方法。 根据该方法，将基板容纳在设置有加热器的烘焙室中。 加热基板，同时将氧和氮的混合气体引入烘焙室中，以便更换烘烤室中的气体。 混合气体以每分钟烘烤室总体积的1/60以上且1/15以下的量引入烘烤室。 根据该方法，除去水分，同时对金属氧化物的透明电极进行适当的表面处理。