公开(公告)号：US06420886B1

公开(公告)日：2002-07-16

申请号：US09552812

申请日：2000-04-20

申请人： Han-Shin Ho ,  Wei-Hai Lai ,  Chien-Shuan Kuo ,  Deng-Tswen Shieh ,  Wen-Cheng Hsu ,  Wea-Fun Fan ,  Hann-Tsong Wang ,  Yuh-Feng Chen

发明人： Han-Shin Ho ,  Wei-Hai Lai ,  Chien-Shuan Kuo ,  Deng-Tswen Shieh ,  Wen-Cheng Hsu ,  Wea-Fun Fan ,  Hann-Tsong Wang ,  Yuh-Feng Chen

IPC分类号： G01R3102

CPC分类号： G01R1/0735

摘要： A membrane probe card is provided. The membrane probe card includes a pressure mechanism having an upper-housing and a support block. The support block has a spring system for providing a distance of travel to the support block. A printed circuit board is coupled to the pressure mechanism for providing electrical connection to a test apparatus. A membrane assembly is coupled to the pads on a wafer for providing electric connection to the printed circuit board. The membrane assembly is a replaceable and modularized component for application to integrated circuits with various layouts and dimensions.

摘要翻译： 提供膜探针卡。 膜探针卡包括具有上壳体和支撑块的压力机构。 支撑块具有用于向支撑块提供行进距离的弹簧系统。 印刷电路板耦合到压力机构，用于提供与测试装置的电连接。 膜组件耦合到晶片上的焊盘，以提供与印刷电路板的电连接。 膜组件是可更换和模块化的组件，用于应用于具有各种布局和尺寸的集成电路。