公开(公告)号：US20090237098A1

公开(公告)日：2009-09-24

申请号：US12061781

申请日：2008-04-03

申请人： Wen Cheng HSU ,  Min Ming Lo ,  Chao Chien Wang ,  Yi Fang Cho

发明人： Wen Cheng HSU ,  Min Ming Lo ,  Chao Chien Wang ,  Yi Fang Cho

IPC分类号： G01R31/02

CPC分类号： G01R31/01 ,  G01R31/2893

摘要： This invention provides a wafer testing system and testing method thereof. The wafer testing system comprises a wafer storage section, a prober, a tester, an RFID middleware unit, an EDA system and an MES system. The wafer storage section stores a multiplicity of carriers, each of which is provided with at least a RFID tag. The prober comprises a RFID reader to read a tag information. The tester sends a test signal to the prober for implementing the wafer test so as to generate a test result and calls an interface program to convert the test result into a file conformed with a specific data format. The RFID middleware unit receives the tag information and calls related applications to process the tag information so as to generate a wafer information. The EDA system receives the file of the specific data format converted from the interface program and calculates thereof to generate a wafer yield information after wafer test. The MES system integrates the wafer information from the RFID middleware unit with the yield information from the EDA system so as to allow monitoring the wafer manufacturing process and testing yield rate in a real-time manner.

摘要翻译： 本发明提供了一种晶片测试系统及其测试方法。 晶片测试系统包括晶片存储部分，探测器，测试器，RFID中间件单元，EDA系统和MES系统。 晶片存储部存储多个载体，每个载体至少设有RFID标签。 该探测器包括读取标签信息的RFID读取器。 测试仪将测试信号发送到探测器，以实现晶片测试，以产生测试结果，并调用接口程序将测试结果转换为符合特定数据格式的文件。 RFID中间件单元接收标签信息并调用相关应用程序来处理标签信息以产生晶片信息。 EDA系统接收从接口程序转换的特定数据格式的文件，并计算它们以在晶片测试之后生成晶片产量信息。 MES系统将RFID中间件单元的晶圆信息与EDA系统的产量信息相集成，以便实时监控晶圆制造过程和测试成品率。

公开(公告)号：US07371023B2

公开(公告)日：2008-05-13

申请号：US11151870

申请日：2005-06-13

申请人： Yu-Ying Chan ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Tseng-Kui Tseng ,  Chen Kun Teng ,  Ho-Li Hsieh

发明人： Yu-Ying Chan ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Tseng-Kui Tseng ,  Chen Kun Teng ,  Ho-Li Hsieh

IPC分类号： G03D5/00

CPC分类号： B08B3/14 ,  G03F7/3092

摘要： An apparatus (100) for processing substrates includes: a substrate cleaning device (20), which cleans the substrates with treating liquid; a developing device (40); and a treating liquid recovery system (30), which is connected with the cleaning device and the developing device. The treating liquid recovery system can convey the treating liquid from the cleaning device to the developing device. Thus the treating liquid that has been used in the cleaning device can be reused in the developing device. Therefore the apparatus can economize on treating liquid and reduce costs.

摘要翻译： 一种用于处理衬底的设备（100），包括：用处理液清洗衬底的衬底清洗装置（20）; 显影装置（40）; 以及与清洁装置和显影装置连接的处理液回收系统（30）。 处理液回收系统可将处理液从清洗装置输送到显影装置。 因此，已经在清洁装置中使用的处理液体可以重新用于显影装置。 因此，该设备可以节省处理液体并降低成本。

公开(公告)号：US07367725B2

公开(公告)日：2008-05-06

申请号：US11111141

申请日：2005-04-20

申请人： Wen-Cheng Hsu ,  Ching-Lung Wang ,  Yu-Ying Chan ,  Tseng-Kuei Tseng

发明人： Wen-Cheng Hsu ,  Ching-Lung Wang ,  Yu-Ying Chan ,  Tseng-Kuei Tseng

IPC分类号： G03D5/00

CPC分类号： G03F7/32 ,  G03D5/04 ,  G03F7/0007 ,  G03F7/30 ,  G03F7/322

摘要： An apparatus (3) for removing developing solution from a substrate (30) includes a working table (36) for placing the substrate, a supporting frame (33) positioned on the working table, a gas dispensing nozzle (31) mounted on the supporting frame, and a water dispensing nozzle (32) mounted on the supporting frame. The apparatus can remove the residual developing solution from the substrate and needs not to lift the substrate. The substrate is safely processed and the working time is improved.

摘要翻译： 一种用于从基板（30）去除显影液的装置（3），包括：放置基板的工作台（36），位于工作台上的支撑框架（33），安装在支撑件上的气体分配喷嘴 框架和安装在支撑框架上的水分配喷嘴（32）。 该装置可以从基板上除去残留的显影液，并且不需要提起基板。 基板被安全处理，工作时间得到改善。

公开(公告)号：US20050274400A1

公开(公告)日：2005-12-15

申请号：US11151870

申请日：2005-06-13

申请人： Yu-Ying Chan ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Tseng-Kui Tseng ,  Chen Teng ,  Ho-Li Hsieh

发明人： Yu-Ying Chan ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Tseng-Kui Tseng ,  Chen Teng ,  Ho-Li Hsieh

IPC分类号： B08B3/00 ,  B08B3/14 ,  G03C3/00 ,  G03C5/18 ,  G03C5/26 ,  G03D3/02 ,  G03F7/30

CPC分类号： B08B3/14 ,  G03F7/3092

摘要： An apparatus (100) for processing substrates includes: a substrate cleaning device (20), which cleans the substrates with treating liquid; a developing device (40); and a treating liquid recovery system (30), which is connected with the cleaning device and the developing device. The treating liquid recovery system can convey the treating liquid from the cleaning device to the developing device. Thus the treating liquid that has been used in the cleaning device can be reused in the developing device. Therefore the apparatus can economize on treating liquid and reduce costs.

摘要翻译： 一种用于处理衬底的设备（100），包括：用处理液清洗衬底的衬底清洗装置（20）; 显影装置（40）; 以及与清洁装置和显影装置连接的处理液回收系统（30）。 处理液回收系统可将处理液从清洗装置输送到显影装置。 因此，已经在清洁装置中使用的处理液体可以重新用于显影装置。 因此，该设备可以节省处理液体并降低成本。

公开(公告)号：US20050233076A1

公开(公告)日：2005-10-20

申请号：US11111100

申请日：2005-04-20

申请人： Shao-Ming Hsu ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh ,  Chen-Kun Teng

发明人： Shao-Ming Hsu ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh ,  Chen-Kun Teng

IPC分类号： C23C14/00 ,  C23C14/32

CPC分类号： H01L21/68735 ,  H01L21/67034 ,  H01L21/6875 ,  H01L21/68757

摘要： An apparatus (20) for supporting a substrate (S2) includes a number of slats (28), a number of connecting blocks (24) separately positioned on the slats, and a number of soft sleeves (22) connected with the connecting blocks, respectively. Because top surfaces of the soft sleeves are shaped as annular, the force applied between the substrate and the soft sleeves is distributed, and is reduced at each contact point. The surface of the substrate is hardly if at all deformed by the soft sleeves, thereby reducing the risk of or even altogether preventing the formation of undulations. The quality of the pattern to be processed is improved.

摘要翻译： 用于支撑基板（S 2）的装置（20）包括多个板条（28），分开定位在板条上的多个连接块（24）和与连接块连接的多个软套筒（22） ， 分别。 由于软套筒的顶面形状为环形，所以施加在基体和软套之间的力分布，并在每个接触点处被减小。 如果通过软套筒变形，基材的表面几乎不变，从而降低或甚至完全防止起伏形成的风险。 要处理的图案的质量得到改善。

公开(公告)号：US20090170601A1

公开(公告)日：2009-07-02

申请号：US11966494

申请日：2007-12-28

申请人： Shuo-Tsung CHIU ,  Wen-Cheng HSU ,  Ping-Lin FAN ,  Hsin-Hua TING ,  Meng-Shiou WU ,  Kuan-Ting CHEN ,  Yen-Ting KAO ,  Hsin-Lin HUANG

发明人： Shuo-Tsung CHIU ,  Wen-Cheng HSU ,  Ping-Lin FAN ,  Hsin-Hua TING ,  Meng-Shiou WU ,  Kuan-Ting CHEN ,  Yen-Ting KAO ,  Hsin-Lin HUANG

IPC分类号： A63F11/00

CPC分类号： A63F13/235 ,  A63F13/06 ,  A63F13/428 ,  A63F2300/1031 ,  A63F2300/6045

摘要： A method for recognizing the position of a wireless controller is applied to an interactive gaming device including a wireless controller, a main apparatus and a host. The main apparatus includes a first ultrasonic receiving module, a second ultrasonic receiving module and a third ultrasonic module which are arranged as a triangle shape. The wireless controller includes an ultrasonic transmitting module for sending an ultrasonic wave which is received by the ultrasonic receiving modules in order to obtain three ultrasonic wave transmission times. The main apparatus sends the ultrasonic wave transmission times to the host. The host calculates the ultrasonic wave transmission times and therefore recognizes the position of the wireless controller. When the wireless controller is moved, the host obtains plurality of coordinate values indicating the motion track of the wireless controller. The motion track of the wireless controller is shown in a display by monitoring the coordinate values.

摘要翻译： 用于识别无线控制器的位置的方法被应用于包括无线控制器，主设备和主机的交互式游戏设备。 主要装置包括以三角形排列的第一超声波接收模块，第二超声波接收模块和第三超声波模块。 无线控制器包括用于发送由超声波接收模块接收的超声波的超声波发送模块，以便获得三个超声波传输时间。 主设备向主机发送超声波传输时间。 主机计算超声波传输时间，从而识别无线控制器的位置。 当无线控制器移动时，主机获得指示无线控制器的运动轨迹的多个坐标值。 通过监视坐标值，显示无线控制器的运动轨迹。

公开(公告)号：US20090114714A1

公开(公告)日：2009-05-07

申请号：US12120909

申请日：2008-05-15

申请人： Cheng-Fang Huang ,  Pin-Hsun Huang ,  Chih-Hsiang Wang ,  Wen-Cheng Hsu ,  Yi-fang Cho ,  An-Hong Liu ,  Yi-Chang Lee

发明人： Cheng-Fang Huang ,  Pin-Hsun Huang ,  Chih-Hsiang Wang ,  Wen-Cheng Hsu ,  Yi-fang Cho ,  An-Hong Liu ,  Yi-Chang Lee

IPC分类号： G06F7/00

CPC分类号： G06Q10/08

摘要： This invention provides an RFID real-time information system accommodated to a semiconductor supply chain for exchanging real-time information. The RFID real-time information system is characterized by comprising an RFID middleware module for generating a stock and logistic information corresponding to a plurality of carriers and wafers from a tag information; a manufacturing information module for storing an object information corresponding to the plurality of wafers; a real-time information module for integrating the RFID middleware module with the manufacturing information module to generate real-time information corresponding to the plurality of wafers and carriers; and a business-to-business (B2B) e-commerce module comprising a plurality of B2B servers respectively disposed in vendors in the semiconductor supply chain for connecting and exchanging the real-time information through a standard protocol of e-commerce.

摘要翻译： 本发明提供一种适用于半导体供应链的RFID实时信息系统，用于交换实时信息。 RFID实时信息系统的特征在于包括：RFID中间件模块，用于从标签信息生成对应于多个载体和晶片的库存和物流信息; 制造信息模块，用于存储对应于所述多个晶片的对象信息; 实时信息模块，用于将RFID中间件模块与制造信息模块集成，以生成与多个晶片和载体对应的实时信息; 以及分别设置在半导体供应链的供应商中的多个B2B服务器的企业对企业（B2B）电子商务模块，用于通过电子商务的标准协议来连接和交换实时信息。

公开(公告)号：US20080311990A1

公开(公告)日：2008-12-18

申请号：US11762294

申请日：2007-06-13

申请人： Shuo-Tsung Chiu ,  Wen-Cheng Hsu

发明人： Shuo-Tsung Chiu ,  Wen-Cheng Hsu

IPC分类号： A63F13/06

CPC分类号： A63F13/428 ,  A63F13/06 ,  A63F13/235 ,  A63F2300/1006 ,  A63F2300/1018 ,  A63F2300/1031 ,  A63F2300/205

摘要： A position system for interactive gaming device has a main apparatus and a wireless controller. The main apparatus has a first ultrasonic receiving module, a second ultrasonic receiving module and a third ultrasonic receiving module. The three ultrasonic receiving modules are arranged as a triangle shape. The wireless controller has an ultrasonic transmitting module. The ultrasonic transmitting module of the wireless controller sends an ultrasonic wave which is received by the ultrasonic receiving modules in order to obtain three ultrasonic wave transmission times. The main apparatus calculates the received transmission time and therefore recognizes the position of the wireless controller. When the wireless controller is moved, the main apparatus obtains a plurality of coordinate values indicating the motion track of the wireless controller. In this case, an electronic device shows the movement of the wireless controller on a display device by monitoring the coordinate values.

摘要翻译： 用于交互式游戏设备的位置系统具有主设备和无线控制器。 主设备具有第一超声波接收模块，第二超声波接收模块和第三超声波接收模块。 三个超声波接收模块被布置成三角形。 无线控制器具有超声波发送模块。 无线控制器的超声波发送模块发送由超声波接收模块接收的超声波，以获得三个超声波传输时间。 主设备计算接收到的传输时间，从而识别无线控制器的位置。 当无线控制器移动时，主设备获得指示无线控制器的运动轨迹的多个坐标值。 在这种情况下，电子设备通过监视坐标值来显示无线控制器在显示设备上的移动。

公开(公告)号：US07326300B2

公开(公告)日：2008-02-05

申请号：US11178069

申请日：2005-07-07

申请人： Lu Nan Sun ,  Ching Lung Wang ,  Wen Cheng Hsu ,  Yu-Ying Chan

发明人： Lu Nan Sun ,  Ching Lung Wang ,  Wen Cheng Hsu ,  Yu-Ying Chan

IPC分类号： B05B13/02 ,  B25B11/00

CPC分类号： H01L21/6715 ,  B05C5/0254 ,  B05C13/00 ,  G03F7/16 ,  H01L21/67784

摘要： A coating apparatus (2) includes a work table (20) having a plurality of blowing holes (201) for suspending a substrate (200) thereabove, a coating unit (22) having a photoresist coating nozzle (222) and a supplying device (224) for photoresist material. The photoresist coating nozzle is disposed above the work table, and the supplying device connects to the coating nozzle for supplying photoresist thereto. In operation, the substrate to be coated is continuously suspended in the gas just above but not in contact with the work table. Therefore, accumulation of static electricity and/or foreign particles on the substrate can be avoided. Gas emitting from the blowing holes can remove foreign particles from the surface of the work table and the backside of the work table.

摘要翻译： 涂覆装置（2）包括具有多个用于悬挂上述基板（200）的吹扫孔（201）的工作台（20），具有光致抗蚀剂涂布喷嘴（222）和供给装置（22）的涂布单元 224）用于光致抗蚀剂材料。 光致抗蚀剂涂布喷嘴设置在工作台的上方，供给装置连接到用于向其施加光致抗蚀剂的涂布喷嘴。 在操作中，待涂覆的基板连续地悬挂在正好在工作台上方但不与工作台接触的气体中。 因此，可以避免静电和/或异物在基板上的积聚。 从吹风孔排出的气体可以从工作台表面和工作台的背面除去异物。

公开(公告)号：US20070062451A1

公开(公告)日：2007-03-22

申请号：US11162692

申请日：2005-09-20

申请人： Wen-Cheng Hsu ,  Kuo-Chin Hung ,  Chin-Ming Hsu ,  Hor-Ta Chaung ,  Chung-Jun Cheng

发明人： Wen-Cheng Hsu ,  Kuo-Chin Hung ,  Chin-Ming Hsu ,  Hor-Ta Chaung ,  Chung-Jun Cheng

IPC分类号： C23C16/00

CPC分类号： H01J37/32183 ,  H01J37/32082

摘要： A stabilizing system for a plasma process is provided. The system has a high frequency power source, a plasma chamber, a control circuit for outputting a control signal, first switch element and an impedance matching network. The first switch element has a first, a second and a first switch control terminals, wherein the first and the first switch control terminals are coupled to the control circuit to determines whether the first and the second terminals element are connected or not according to the control signal. The impedance matching network has a first terminal coupled to the plasma chamber, a second terminal coupled to the high frequency power source and a matching control terminal coupled to the second terminal of the first switch element. In this way, whether an impedance matching auto-tune operation for the high frequency power is performed or not is determined based on the control signal.

摘要翻译： 提供了一种用于等离子体工艺的稳定系统。 该系统具有高频电源，等离子体室，用于输出控制信号的控制电路，第一开关元件和阻抗匹配网络。 第一开关元件具有第一开关控制端子和第一开关控制端子，其中第一开关控制端子和第一开关控制端子耦合到控制电路，以根据控制来确定第一和第二端子元件是否连接 信号。 阻抗匹配网络具有耦合到等离子体室的第一端子，耦合到高频电源的第二端子和耦合到第一开关元件的第二端子的匹配控制端子。 以这种方式，基于控制信号确定是否执行用于高频功率的阻抗匹配自动调谐操作。