公开(公告)号：US5697839A

公开(公告)日：1997-12-16

申请号：US679912

申请日：1996-07-15

申请人： Ying-Hsiang Chen ,  Wei-Yao Chien ,  Deh-Hsiung Peng ,  Yung-Mao Hsu

发明人： Ying-Hsiang Chen ,  Wei-Yao Chien ,  Deh-Hsiung Peng ,  Yung-Mao Hsu

IPC分类号： B08B15/02

CPC分类号： B08B15/026

摘要： An apparatus for venting hazardous effluents from process equipment used in the manufacture of semiconductors, which is part of a larger ventilating system, is a "see-thru" transparent chamber which performs the function of a hood, and can be mounted on any one of the conventional semiconductor processing equipment. Because it is transparent, the operator can easily determine when to clean the hood. This is important from the point of view of not exposing the work piece in the processing equipment to effluent contaminants. Usually, the effluents are hazardous to health. Hence, the apparatus is equipped with a pair of gloves which are an integral part of an access door to the hood, and is used to manipulate remotely cleaning tools that are kept inside said hood: remote in the sense that the operator is never exposed to the hazardous effluents inside the chamber hood, and yet is easily capable of using the cleaning tools inside the hood by means of the pair gloves that are an integral part of the hood. The throughput of the manufacturing line is favorably affected since cleaning can be accomplished without stopping the process taking place in the semiconductor manufacturing line.

摘要翻译： 用于制造半导体的工艺设备中排放危险废液的装置是作为较大通风系统的一部分的“透明”透明室，其执行罩的功能，并且可以安装在任何一个 传统的半导体加工设备。 因为它是透明的，操作者可以很容易地确定何时清洁罩。 从处理设备中的工件不会暴露于污染物的观点来看，这一点很重要。 通常，流出物对健康有害。 因此，该装置配备有一对手套，这些手套是通向发动机盖的入口门的组成部分，并且用于操纵保持在所述罩内的远程清洁工具：远离操作者从未暴露于 腔室罩内的危险废液，但是通过作为罩的组成部分的成对手套，能够容易地使用罩内的清洁工具。 生产线的生产能力受到影响，因为可以在不停止在半导体生产线中发生的工艺的情况下完成清洁。