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公开(公告)号：US20140375986A1
公开(公告)日：2014-12-25
申请号：US14342291
申请日：2012-06-28
申请人： Alfons Zöller , Harro Hagedorn , Eckhard Wirth , Werner Weinrich , Tobias Gross
发明人： Alfons Zöller , Harro Hagedorn , Eckhard Wirth , Werner Weinrich , Tobias Gross
CPC分类号： G01N21/88 , G01B11/0616 , G01B11/0691 , G01N21/253 , G01N2021/8427
摘要： A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.
摘要翻译： 一种用于在真空涂层系统中光学测量层性能的测试玻璃变换器，包括用于通过涂料材料引导衬底的可移动衬底保持器; 连接到旋转主轴并且相对于基板保持器围绕旋转主轴可旋转的安装件; 以及控制装置，其将测试玻璃元件引导到光学测量装置的射线路径中并进入涂层材料的流中。 在每种情况下，安装座具有至少两个相对于主轴偏心偏移的凹部，用于一个测试玻璃元件。 控制装置可以引起安装件围绕主轴的旋转运动。 定心装置可以在支架上施加扭矩和保持力矩，以将设置在其中一个凹部中的测试玻璃元件带入测量装置的测量位置。 还提供了相关方法。
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公开(公告)号：US10012595B2
公开(公告)日：2018-07-03
申请号：US14342291
申请日：2012-06-28
申请人： Alfons Zöller , Harro Hagedorn , Eckhard Wirth , Werner Weinrich , Tobias Gross
发明人： Alfons Zöller , Harro Hagedorn , Eckhard Wirth , Werner Weinrich , Tobias Gross
CPC分类号： G01N21/88 , G01B11/0616 , G01B11/0691 , G01N21/253 , G01N2021/8427
摘要： A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.
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公开(公告)号：US06841942B2
公开(公告)日：2005-01-11
申请号：US10663434
申请日：2003-09-16
申请人： Rudolf Beckmann , Markus Fuhr , Walter Zultzke , Werner Weinrich
发明人： Rudolf Beckmann , Markus Fuhr , Walter Zultzke , Werner Weinrich
CPC分类号： H01J37/321 , H01J37/32009
摘要： The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate (5) provided with holes (13, 14) is provided beneath a plasma volume (17), which is disposed above a wall (21) of a plasma chamber (3). Through this plate (5) an ignition volume (16) is formed beneath the plasma volume (17) with a higher pressure than in the plasma volume (17), in which the plasma ignites first. The ignition is subsequently propagated through the holes of the plate (5) into the plasma volume (17).
摘要翻译： 本发明涉及一种其等离子体被电压点燃的等离子体源。 为了能够在相对低的电压下进行点火，在设置在等离子体室（21）的上方的等离子体体积（17）的下方设置有设有孔（13,14）的板（5） 3）。 通过该板（5），在等离子体体积（17）下形成的点火体积（16）的压力高于等离子体体积（17），其中等离子体首先点燃。 点火随后通过板（5）的孔传播到等离子体体积（17）中。
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