公开(公告)号：US07726876B2

公开(公告)日：2010-06-01

申请号：US12048881

申请日：2008-03-14

Applicant: Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

Inventor： Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

IPC: G01J5/00 ,  G01K1/00

CPC classification number: G01J5/02 ,  G01J5/0037 ,  G01J5/0255 ,  G01J5/08 ,  G01J5/0893 ,  G01J5/12

Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.

Abstract translation: 本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。 在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。 流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。 可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。 在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

公开(公告)号：US20080225925A1

公开(公告)日：2008-09-18

申请号：US12048881

申请日：2008-03-14

Applicant: Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

Inventor： Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

IPC: G01J5/08

CPC classification number: G01J5/02 ,  G01J5/0037 ,  G01J5/0255 ,  G01J5/08 ,  G01J5/0893 ,  G01J5/12

Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.

Abstract translation: 本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。 在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。 流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。 可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。 在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。