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    TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE PROFILE, RECORDING MEDIUM AND HEAT TREATMENT APPARATUS
    3.
    发明申请
    TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE PROFILE, RECORDING MEDIUM AND HEAT TREATMENT APPARATUS 有权
    温度测量装置，测量温度曲线，记录介质和热处理装置的方法

    公开(公告)号：US20120303313A1

    公开(公告)日：2012-11-29

    申请号：US13478325

    申请日：2012-05-23

    Applicant: Masayuki MOROI ,  Hitoshi Kikuchi

    Inventor： Masayuki MOROI ,  Hitoshi Kikuchi

    IPC: G01K1/02 ,  F27D5/00 ,  G06F15/00 ,  F27B9/40

    CPC classification number: C23C16/45525 ,  C23C16/4584 ,  C23C16/4585 ,  C23C16/46 ,  C23C16/52 ,  G01J5/0007 ,  G01J5/0022 ,  G01J5/025 ,  G01J5/0255 ,  G01J5/026 ,  G01J5/0809 ,  G01J5/0831 ,  G01J5/089 ,  G01J5/0893 ,  G01J2005/0085

    Abstract: A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

    Abstract translation: 一种用于测量安装在旋转台上的基板的温度分布的温度测量装置，包括辐射温度测量单元，其被配置为通过旋转台的半径方向测量旋转台的表面上的多个温度测量区域的温度 在半径方向上扫描旋转台的表面; 温度映射生成单元，其基于由所述辐射温度测量单元测量的针对所述旋转台的半径方向上的每个扫描操作的温度测量区域的数量来指定所述温度测量区域的地址，以及所述温度测量区域的旋转速度 旋转台，并将与对应的地址对应的温度存储在存储单元中; 以及温度数据显示处理单元，其显示所述旋转台的温度分布。

    System and method for non-intrusive thermal monitor
    4.
    发明授权
    System and method for non-intrusive thermal monitor 失效
    非侵入式热监测系统和方法

    公开(公告)号：US07726876B2

    公开(公告)日：2010-06-01

    申请号：US12048881

    申请日：2008-03-14

    Applicant: Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

    Inventor： Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

    IPC: G01J5/00 ,  G01K1/00

    CPC classification number: G01J5/02 ,  G01J5/0037 ,  G01J5/0255 ,  G01J5/08 ,  G01J5/0893 ,  G01J5/12

    Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.

    Abstract translation: 本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。 在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。 流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。 可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。 在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

    HANDHELD LIBS ANALYZER END PLATE PURGING STRUCTURE
    7.
    发明申请
    HANDHELD LIBS ANALYZER END PLATE PURGING STRUCTURE 有权
    手持式分析仪终板采样结构

    公开(公告)号：US20150138545A1

    公开(公告)日：2015-05-21

    申请号：US14608359

    申请日：2015-01-29

    Applicant: SciAps, Inc.

    Inventor： David R. Day ,  Konstantin Derman ,  John Francis Egan ,  Paul Edward Soucy

    IPC: G01J3/02 ,  G01J3/443

    CPC classification number: G01J3/0272 ,  G01J3/0297 ,  G01J3/2823 ,  G01J3/443 ,  G01J5/0255 ,  G01N21/718 ,  G01N2201/0221 ,  H01J37/32321

    Abstract: A handheld LIBS analyzer includes a laser source for generating a laser beam and a spectrometer subsystem for analyzing a plasma generated when the laser beam strikes a sample. A nose section includes an end plate with an aperture for the laser beam, a purge cavity behind the aperture fluidly connected to a source of purge gas, and a shield covering the purge cavity. A vent removes purge gas from the purge cavity when the end plate is placed on the sample.

    Abstract translation: 手持式LIBS分析仪包括用于产生激光束的激光源和用于分析当激光束撞击样品时产生的等离子体的光谱仪子系统。 鼻部包括具有用于激光束的孔的端板，在孔的后面的清洗腔，流体地连接到吹扫气体源，以及覆盖吹扫腔的屏蔽。 当端板放置在样品上时，排气口将吹扫气体从吹扫腔中移除。

    OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL
    9.
    发明申请
    OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STRAY LIGHT REDUCTION FOR TEMPERATURE MEASUREMENT SYSTEM OF RTP TOOL 失效
    RTP工具温度测量系统的光学路径改进，聚焦长度变化补偿和轻量化减轻

    公开(公告)号：US20040037347A1

    公开(公告)日：2004-02-26

    申请号：US10225590

    申请日：2002-08-22

    Inventor： Douglas Brown ,  Robert David Meadows ,  David Tao ,  Mathias Koch

    IPC: G01J005/00

    CPC classification number: G01J5/08 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/02 ,  G01J5/0255 ,  G01J5/04 ,  G01J5/045 ,  G01J5/046 ,  G01J5/061 ,  G01J5/0806 ,  G01J5/084 ,  G01J5/0846 ,  G01J5/0875 ,  G01J5/0893 ,  H01L21/67248

    Abstract: The present invention is directed to a pyrometer system and comprises an elevator tube. The elevator tube comprises an inner tube and an outer tube surrounding the inner tube in telescoping arrangement and extending from a top to a bottom thereof, the arrangement defining a fluid passageway therebetween. The elevator tube further comprises a port associated with the outer tube that is operable to transmit a cooling gas therethrough into the fluid passageway. A pyrometer head is coupled to the bottom of the inner tube and is operable to transmit and receive radiation through the inner tube. The system further comprises a spider collar coupled to at least one of a top of the inner tube or outer tube, and is operable to support a work piece for thermal measurement thereof.

    Abstract translation: 本发明涉及一种高温计系统，包括电梯管。 电梯管包括内管和外管，其围绕内管以伸缩布置并从其顶部延伸到底部，该布置在其间限定了流体通道。 电梯管还包括与外管相关联的端口，其可操作以将冷却气体通过其传送到流体通道中。 高温计头部连接到内管的底部并且可操作以通过内管传送和接收辐射。 所述系统还包括联接到所述内管或外管的顶部中的至少一个的蜘蛛环，并且可操作以支撑用于其热测量的工件。

    Thermographic analysis of polymeric materials
    10.
    发明授权
    Thermographic analysis of polymeric materials 有权

    公开(公告)号：US10078063B2

    公开(公告)日：2018-09-18

    申请号：US15504664

    申请日：2015-08-10

    Applicant: COLORMATRIX HOLDINGS, INC.

    Inventor： Phillip Brannon

    IPC: G01N25/72 ,  G01N33/44 ,  G01J5/10 ,  G01J5/08 ,  G01J5/02 ,  G01J5/00

    CPC classification number: G01N25/72 ,  G01J5/0255 ,  G01J5/0875 ,  G01J5/10 ,  G01J2005/0081 ,  G01N33/44

    Abstract: Apparatus (2) includes a platform (14) on which is supported, via spaced apart posts (16), a stationary rigid support disc (17). Between the platform (14) and disc (17), plaque holder (18) is rotatably mounted. The plaque holder is arranged to hold a plaque (19) for assessment. The plaque is made by injection molding from a composition comprising a polymeric material and a specific amount of reheat additive(s) and any other additives(s) to be assessed. The plaque holder is arranged to move the plaque relative to the disc (17). In an input position, the plaque holder (18) is arranged directly underneath opening (20). In a measurement position, which is 90° from the input position, there are provided first and second temperature measuring assemblies (24, 26) arranged to measure the temperature of the top and bottom surfaces of a plaque held in the plaque holder. The plaque holder can be rotated through 90° from the measurement position to a heating position, wherein the plaque is positioned directly below a heat lamp. In use, the plaque holder is rotated to the heating position, wherein the plaque is heated by the lamp for a predetermined time. Then the plaque holder is rapidly rotated back to the measurement position, wherein the temperatures of the upper and lower surfaces of the plaque are rapidly measured. These steps are repeated and data recorded to allow reheat and/or other characteristics of the plaque to be assessed over time.

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