Thin Film Transistor Array Panel and Method for Manufacturing the Same
    1.
    发明申请
    Thin Film Transistor Array Panel and Method for Manufacturing the Same 有权
    薄膜晶体管阵列面板及其制造方法

    公开(公告)号:US20110068340A1

    公开(公告)日:2011-03-24

    申请号:US12652379

    申请日:2010-01-05

    IPC分类号: H01L33/00 H01L21/336

    CPC分类号: H01L27/124 H01L29/78618

    摘要: A thin film transistor array panel includes an insulating substrate. A gate line is formed on the insulating substrate and has a gate electrode. A gate insulating layer is formed on the gate line. A semiconductor layer is formed on the gate insulating layer and overlaps the gate electrode. Diffusion barriers are formed on the semiconductor layer and contain nitrogen. A data line crosses the gate line and has a source electrode partially contacting the diffusion barriers and a drain electrode partially contacting the diffusion barriers and facing the source electrode. The drain electrode is on the gate electrode. A pixel electrode is electrically connected to the drain electrode.

    摘要翻译: 薄膜晶体管阵列面板包括绝缘基板。 在绝缘基板上形成栅极线,并具有栅电极。 在栅极线上形成栅极绝缘层。 半导体层形成在栅极绝缘层上并与栅电极重叠。 在半导体层上形成扩散阻挡层并含有氮。 数据线与栅极线交叉,并且具有部分地接触扩散阻挡层的源电极和部分地接触扩散阻挡层并面向源电极的漏电极。 漏电极在栅电极上。 像素电极电连接到漏电极。

    Thin film transistor array panel and method for manufacturing the same
    2.
    发明授权
    Thin film transistor array panel and method for manufacturing the same 有权
    薄膜晶体管阵列面板及其制造方法

    公开(公告)号:US08198657B2

    公开(公告)日:2012-06-12

    申请号:US12652379

    申请日:2010-01-05

    IPC分类号: H01L23/52 H01L21/82

    CPC分类号: H01L27/124 H01L29/78618

    摘要: A thin film transistor array panel includes an insulating substrate. A gate line is formed on the insulating substrate and has a gate electrode. A gate insulating layer is formed on the gate line. A semiconductor layer is formed on the gate insulating layer and overlaps the gate electrode. Diffusion barriers are formed on the semiconductor layer and contain nitrogen. A data line crosses the gate line and has a source electrode partially contacting the diffusion barriers and a drain electrode partially contacting the diffusion barriers and facing the source electrode. The drain electrode is on the gate electrode. A pixel electrode is electrically connected to the drain electrode.

    摘要翻译: 薄膜晶体管阵列面板包括绝缘基板。 在绝缘基板上形成栅极线,并具有栅电极。 在栅极线上形成栅绝缘层。 半导体层形成在栅极绝缘层上并与栅电极重叠。 在半导体层上形成扩散阻挡层并含有氮。 数据线与栅极线交叉,并且具有部分地接触扩散阻挡层的源电极和部分地接触扩散阻挡层并面向源电极的漏电极。 漏电极在栅电极上。 像素电极电连接到漏电极。