利索-全球专利检索

  1. Login
  2. Sign Up

Search Results

4 records (took 0.009 seconds)

    Semiconductor device and production method thereof
    2.
    发明授权
    Semiconductor device and production method thereof 失效
    半导体装置及其制造方法

    公开(公告)号：US06483167B1

    公开(公告)日：2002-11-19

    申请号：US09644716

    申请日：2000-08-23

    Applicant: Toshihide Nabatame ,  Masaru Kadoshima ,  Takaaki Suzuki ,  Tetsuo Fujiwara ,  Seiji Watahiki ,  Yasuhiko Murata ,  Mitsuo Hayashibara

    Inventor： Toshihide Nabatame ,  Masaru Kadoshima ,  Takaaki Suzuki ,  Tetsuo Fujiwara ,  Seiji Watahiki ,  Yasuhiko Murata ,  Mitsuo Hayashibara

    IPC: H01L2900

    CPC classification number: H01L28/60 ,  H01L28/55 ,  H01L28/91

    Abstract: In a semiconductor device and production method thereof, a technique is used to prevent film separation of the bottom electrode occurring during a heat treatment process which is carried out to make the bottom electrode closely packed and in the heat treatment process for producing dielectric crystallization. In the production method, a glue layer including an insulator is formed between SiO2 insulation layer and the inner wall of a concave hole. The SiO2 layer 14 is located on the Si board 11, and Si plug 12 and a barrier layer 13 are formed therein. A glue layer 16 is formed on the inner wall of the hole of the SiO2 insulation layer 15, and a bottom electrode 17 comprising Ru is formed on the barrier layer 13 and glue layer 16. Dielectric film 18 comprising BST and a top electrode 19 comprising Ru are laminated sequentially on the bottom electrode 17, to form a dielectric device with the bottom electrode 17.

    Abstract translation: 在半导体装置及其制造方法中，使用这样的技术来防止在进行底部电极紧密堆积的热处理过程中发生的底部电极的膜分离和用于产生电介质结晶的热处理工艺。 在制造方法中，在SiO2绝缘层和凹孔的内壁之间形成包含绝缘体的胶层。 SiO 2层14位于Si基板11上，形成Si塞12和阻挡层13。 在SiO 2绝缘层15的孔的内壁上形成胶层16，在阻挡层13和胶层16上形成包含Ru的底部电极17.包含BST的电介质膜18和顶部电极19包括 Ru依次层叠在底部电极17上，形成具有底部电极17的电介质器件。

    Hydraulic power system
    3.
    发明授权
    Hydraulic power system 失效
    液压动力系统

    公开(公告)号：US4464898A

    公开(公告)日：1984-08-14

    申请号：US332934

    申请日：1981-12-21

    Applicant: Yukio Aoyagi ,  Shuichi Ichiyama ,  Yasuhiko Murata

    Inventor： Yukio Aoyagi ,  Shuichi Ichiyama ,  Yasuhiko Murata

    IPC: E02F9/12 ,  F15B11/08 ,  F16H61/40 ,  F16H61/4157 ,  F16H61/42 ,  F16H61/433 ,  F16D33/00

    CPC classification number: F16H61/4157 ,  E02F9/128 ,  F16H61/433 ,  F16H61/46 ,  F15B2211/20561

    Abstract: A hydraulic power system having a variable displacement hydraulic pump, a hydraulic motor driven by the hydraulic pump for actuating a load, the pump and motor being connected to constitute a closed hydraulic circuit, hydraulic servo for controlling the displacement volume of the pump, and motor stopping device including a brake arrangement adapted to release the motor from a braked condition when a control pressure from a hydraulic fluid source is received. The system includes a control valve responsive to a main line pressure in the closed hydraulic circuit for controlling a hydraulic fluid supply to the servo to prevent the main line pressure from substantially exceeding a predetermined level, first pressure transmission control interlocked with an input of the servo for transmitting the control pressure to the brake arrangement when the input is actuated, and a second pressure transmission control responsive to the pressure of a hydraulic fluid supply to the servo on the output side of the control valve for transmitting the control pressure to the brake arrangement when the supply pressure is substantially lower than a normal supply pressure of the hydraulic fluid source.

    Abstract translation: 具有可变排量液压泵的液压动力系统，由用于致动负载的液压泵驱动的液压马达，连接泵和马达构成闭合液压回路，用于控制泵的排量的液压伺服机构和马达 该制动装置包括适于在接收到来自液压流体源的控制压力时将马达从制动状态释放的制动装置。 该系统包括响应于闭合液压回路中的主管路压力的控制阀，用于控制对伺服机构的液压流体供给，以防止主管路压力基本上超过预定水平，与伺服机构的输入端互锁的第一压力传递控制 用于在所述输入被致动时将所述控制压力传递到所述制动装置;以及第二压力传递控制，其响应于所述控制阀输出侧的所述伺服器的液压流体供应的压力，用于将所述控制压力传递到所述制动装置 当供应压力基本上低于液压流体源的正常供应压力时。

Patent Agency Ranking