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公开(公告)号：US09041937B2
公开(公告)日：2015-05-26
申请号：US13577044
申请日：2011-02-02
申请人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
发明人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
CPC分类号： G01B9/02023 , G01B9/02058 , G01B9/0209 , G01K11/00
摘要： [Problem to be Solved] To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution] An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
摘要翻译： [待解决的问题]提高利用干扰的干涉测量装置的测量精度。 解决方案干扰测量装置包括用于发射超连续光（SC灯）的光源10，用于将SC光分解为测量光和参考光的光纤耦合器11，色散补偿元件12，驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。 待测量的测量对象15是厚度为800μm的Si衬底。 色散补偿元件12是厚度为780μm的Si衬底。 也就是说，色散补偿元件12由与测量对象15相同的材料形成，并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射 由于波长色散几乎完全消除，所以色散补偿元件12的表面具有窄的峰宽。 因此，测量峰值位置的精度提高。 结果，测量温度等的精度提高。
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公开(公告)号：US20120300218A1
公开(公告)日：2012-11-29
申请号：US13577044
申请日：2011-02-02
申请人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
发明人： Masaru Hori , Masafumi Ito , Yasuhiro Higashijima , Takayuki Ohta
CPC分类号： G01B9/02023 , G01B9/02058 , G01B9/0209 , G01K11/00
摘要： [Problem to be Solved]To improve the measurement accuracy of an interference measurement device which utilizes interference of light.[Means for Solution]An interference measurement device includes a light source 10 for emitting supercontinuum light (SC light), an optical fiber coupler 11 for splitting the SC light into measurement light and reference light, a dispersion compensation element 12, a drive unit 13 for moving the dispersion compensation element 12, and light-receiving means 14 for measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement object 15 to be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation element 12 is an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation element 12 is formed of the same material as that of the measurement object 15 and is 20 μm thinner than the measurement object 15. The interference caused by reflection on the back surface of the measurement object 15 and reflection on the back surface of the dispersion compensation element 12 has a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.
摘要翻译： [待解决的问题]提高利用干扰的干涉测量装置的测量精度。 解决方案干扰测量装置包括用于发射超连续光（SC灯）的光源10，用于将SC光分解为测量光和参考光的光纤耦合器11，色散补偿元件12，驱动单元13 用于移动色散补偿元件12和用于测量作为测量光和参考光之间的干涉的结果而产生的干涉波形的光接收装置14。 待测量的测量对象15是厚度为800μm的Si衬底。 色散补偿元件12是厚度为780μm的Si衬底。 也就是说，色散补偿元件12由与测量对象15相同的材料形成，并且比测量对象15薄20μm。由测量对象15的背面上的反射引起的干涉和背面的反射 由于波长色散几乎完全消除，所以色散补偿元件12的表面具有窄的峰宽。 因此，测量峰值位置的精度提高。 结果，测量温度等的精度提高。
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