公开(公告)号：US07339139B2

公开(公告)日：2008-03-04

申请号：US10678811

申请日：2003-10-03

申请人： Yimou Yang ,  Kenneth Martin ,  Stanley J. Misunas ,  Song Tao ,  David Morganson

发明人： Yimou Yang ,  Kenneth Martin ,  Stanley J. Misunas ,  Song Tao ,  David Morganson

IPC分类号： H05B3/30 ,  F27B14/04 ,  F27B14/06 ,  F27B14/14 ,  C23C14/26 ,  C23C14/56

CPC分类号： C23C14/26 ,  C23C14/243 ,  C23C14/246 ,  C23C14/56 ,  C23C14/562

摘要： The present invention provides a system and method for uniform coating of a substrate at high deposition rates by evaporating a coating material in a vacuum chamber. The system includes an evaporator having a heating crucible for containing a coating material to be evaporated and a generally planar heat source disposed so as to heat a surface of a coating material contained in the heating crucible. Preferably, the heat source is manufactured from a ceramic or intermetallic material and includes a first layer defining a first set of openings and a second layer defining a second set of openings wherein the second layer overlies the first layer and is spaced apart therefrom. The first and second sets of openings allow the evaporated coating material to pass therethrough for dispersion of the coating material in a deposition zone defined by a containment shield disposed above the heat source.

摘要翻译： 本发明提供一种通过蒸发真空室中的涂层材料以高沉积速率均匀地涂覆基板的系统和方法。 该系统包括具有用于容纳要蒸发的涂料的加热坩埚的蒸发器和设置为加热包含在加热坩埚中的涂料的表面的大致平面的热源。 优选地，热源由陶瓷或金属间材料制成，并且包括限定第一组开口的第一层和限定第二组开口的第二层，其中第二层覆盖在第一层上并与之隔开。 第一组和第二组开口允许蒸发的涂层材料通过，以将涂层材料分散在由设置在热源上方的容纳屏蔽限定的沉积区域中。

公开(公告)号：US20130071641A1

公开(公告)日：2013-03-21

申请号：US13233157

申请日：2011-09-15

申请人： James P. DiBattista ,  Yimou Yang

发明人： James P. DiBattista ,  Yimou Yang

IPC分类号： B32B7/02

CPC分类号： B32B7/12 ,  B32B27/06 ,  B32B2307/412 ,  B32B2457/20 ,  Y10T428/24975

摘要： A hard coat film comprising a polymer film substrate, an organic adhesion layer formed on a surface of the film substrate by depositing a first organic material on a surface of the film substrate in vacuum, and an organic hard coat layer formed on a surface of the adhesion layer by depositing a second organic material on the adhesion layer in vacuum is disclosed. Preferably, the layers are separately cured following the deposition processes. The adhesion layer has a thickness in a range of about 0.025 μm to about 20 μm and the hard coat layer has a thickness in a range of about 0.025 μm to about 20 μm. Optionally, the hard coat film includes an inorganic layer formed between the adhesion layer and the hard coat layer. Also disclosed is a process for forming a hard coat film by depositing multiple layers of organic and/or inorganic materials on a substrate in vacuum.

摘要翻译： 一种硬涂膜，其包含聚合物膜基材，通过在真空中沉积薄膜基材的表面上的第一有机材料，形成在所述薄膜基材的表面上的有机粘合层，以及形成在所述薄膜基材的表面上的有机硬涂层 公开了通过在真空中在粘合层上沉积第二有机材料的粘附层。 优选地，这些层在沉积工艺之后分开固化。 粘合层的厚度在约0.025μm至约20μm的范围内，并且硬涂层的厚度在约0.025μm至约20μm的范围内。 任选地，硬涂膜包括在粘合层和硬涂层之间形成的无机层。 还公开了通过在真空中在基板上沉积多层有机和/或无机材料来形成硬涂层膜的方法。

公开(公告)号：US20050072361A1

公开(公告)日：2005-04-07

申请号：US10678811

申请日：2003-10-03

申请人： Yimou Yang ,  Kenneth Martin ,  Stanley Misunas ,  Song Tao ,  David Morganson

发明人： Yimou Yang ,  Kenneth Martin ,  Stanley Misunas ,  Song Tao ,  David Morganson

IPC分类号： C23C14/24 ,  C23C14/26 ,  C23C14/56 ,  C23C16/00

CPC分类号： C23C14/26 ,  C23C14/243 ,  C23C14/246 ,  C23C14/56 ,  C23C14/562

摘要： The present invention provides a system and method for uniform coating of a substrate at high deposition rates by evaporating a coating material in a vacuum chamber. The system includes an evaporator having a heating crucible for containing a coating material to be evaporated and a generally planar heat source disposed so as to heat a surface of a coating material contained in the heating crucible. Preferably, the heat source is manufactured from a ceramic or intermetallic material and includes a first layer defining a first set of openings and a second layer defining a second set of openings wherein the second layer overlies the first layer and is spaced apart therefrom. The first and second sets of openings allow the evaporated coating material to pass therethrough for dispersion of the coating material in a deposition zone defined by a containment shield disposed above the heat source.

摘要翻译： 本发明提供一种通过蒸发真空室中的涂层材料以高沉积速率均匀地涂覆基板的系统和方法。 该系统包括具有用于容纳要蒸发的涂料的加热坩埚的蒸发器和设置为加热包含在加热坩埚中的涂料的表面的大致平面的热源。 优选地，热源由陶瓷或金属间材料制成，并且包括限定第一组开口的第一层和限定第二组开口的第二层，其中第二层覆盖在第一层上并与之隔开。 第一组和第二组开口允许蒸发的涂层材料通过，以将涂层材料分散在由设置在热源上方的容纳屏蔽限定的沉积区域中。