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公开(公告)号:US20080057410A1
公开(公告)日:2008-03-06
申请号:US11515049
申请日:2006-08-31
CPC分类号: G03F1/84
摘要: A method is described for repairing a defect detected in a photolithographic mask. A phase voxel cavity is formed in the photolithographic mask to compensate for the defect in the photolithographic mask. The phase voxel cavity and features of the mask both create a phase shift of approximately π.
摘要翻译: 描述了修复在光刻掩模中检测到的缺陷的方法。 在光刻掩模中形成相体腔,以补偿光刻掩模中的缺陷。 相位体腔和掩模的特征都产生大约π的相移。
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公开(公告)号:US20060016436A1
公开(公告)日:2006-01-26
申请号:US11184474
申请日:2005-07-19
申请人: J. Groom , Yip Kwok , Michael Brock
发明人: J. Groom , Yip Kwok , Michael Brock
IPC分类号: F02M25/08
CPC分类号: F02M25/08 , F02M25/0854 , F02M25/0872 , F02M2025/0863
摘要: An evaporative emissions control fuel cap system comprises a closure adapted to mate with a fuel tank. The closure includes a passageway formed therein to conduct vapors from the fuel tank to the atmosphere. The closure includes a filter configured to capture hydrocarbons positioned in the passageway so that fuel vapor flowing from the fuel tank is scrubbed of hydrocarbons before being discharged to the atmosphere.
摘要翻译: 蒸发排放控制燃料盖系统包括适于与燃料箱配合的封闭件。 封闭件包括形成在其中的通道,用于将蒸气从燃料箱传导到大气中。 封闭件包括一个过滤器,其构造成捕获定位在通道中的碳氢化合物,使得从燃料箱流出的燃料蒸气在被排放到大气中之前被碳氢化合物洗涤。
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