公开(公告)号：US06364640B1

公开(公告)日：2002-04-02

申请号：US09685092

申请日：2000-10-11

申请人： Kiyoshi Nishio ,  Ryo Imanishi ,  Yoji Minato ,  Masayoshi Katsura ,  Hitoshi Kawamura ,  Makoto Fujii

发明人： Kiyoshi Nishio ,  Ryo Imanishi ,  Yoji Minato ,  Masayoshi Katsura ,  Hitoshi Kawamura ,  Makoto Fujii

IPC分类号： F04B1100

CPC分类号： F04B11/0016 ,  F04B9/125 ,  F04B39/0061 ,  F04B43/073

摘要： The invention provides a pump with a pulsation suppression device which can further enhance the effect of suppressing pulsation. According to the invention, in one side portion of a pump head wall 1 having inflow and outflow passages 2 and 3, a first bellows 7 which is driven so as to extend and contract by an air cylinder portion 14, and check valves 16a and 16b which alternately open and close a pump working chamber 9a formed in the first bellows 7 are disposed to constitute a reciprocal pump portion 4. In the other side portion of the pump head wall 1, a pulsation suppressing portion 5 is configured so as to have a second bellows 18 that is extendable and contractible, and that forms: a liquid chamber 20a which can temporarily store liquid that is to be discharged from the pump portion 4; and an air chamber 20b which is isolated from the liquid chamber 20a. The pulsation suppressing portion absorbs pulsation of the liquid which is discharged from the pump portion 4, by a change in the capacity of the liquid chamber 20a. The extension rate of the second bellows 18 is set to be larger than that of the first bellows 7.

摘要翻译： 本发明提供一种具有脉动抑制装置的泵，其可以进一步增强抑制脉动的效果。根据本发明，在具有流入通道2和流出通道3的泵头壁1的一侧部分中，第一波纹管7 被驱动以由气缸部分14延伸和收缩，并且设置交替打开和关闭形成在第一波纹管7中的泵工作室9a的止回阀16a和16b，以构成往复泵部分4.另一侧 泵头壁1的一部分，脉动抑制部5被配置为具有可伸缩的第二波纹管18，并且形成：液体室20a，其能够临时储存从泵排出的液体 第4部分; 以及与液体室20a隔离的空气室20b。 脉动抑制部通过液体室20a的容量的变化吸收从泵部4排出的液体的脉动。 第二波纹管18的延伸率被设定为大于第一波纹管7的伸长率。

公开(公告)号：US06095194A

公开(公告)日：2000-08-01

申请号：US265355

申请日：1999-03-10

申请人： Yoji Minato ,  Masayoshi Katsura ,  Makoto Fujii

发明人： Yoji Minato ,  Masayoshi Katsura ,  Makoto Fujii

IPC分类号： F04B11/00 ,  F16L55/04

CPC分类号： F04B11/0016

摘要： The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material. According to the present invention, pulsation due to the discharge pressure of the transported liquid is absorbed and the amplitude of pulsation is suppressed to a low level. Moreover, the bellows used in the pulsation suppression device is prevented from being damaged, and the pulsation suppression function can be stabilized.

摘要翻译： 脉动抑制装置技术领域本发明涉及一种脉冲抑制装置，其被插入到液体输送管中，通过该液体输送管中的诸如用于清洗IC的表面清洗液的化学液体通过往复泵输送。 本发明的脉动抑制装置具有：将具有密封容器状的装置主体的内部分隔成液体室和气室的波纹管; 与波纹管互锁的操作杆; 以及延伸收缩限制机构，当波纹管延伸到预定值时，其与波纹管的封闭端面平行地接触，从而限制波纹管的进一步延伸。 此外，本发明的脉动抑制装置具有使操作杆的往复运转与波纹管的伸缩方向一致的引导件。 导轨由低摩擦树脂材料制成。 根据本发明，由于输送液体的排出压力而产生的脉动被吸收，脉动幅度被抑制到低水平。 此外，防止在脉动抑制装置中使用的波纹管被损坏，并且可以使脉动抑制功能稳定。

公开(公告)号：US06488487B2

公开(公告)日：2002-12-03

申请号：US09848324

申请日：2001-05-04

申请人： Yoji Minato

发明人： Yoji Minato

IPC分类号： F04B1100

CPC分类号： F04B11/0016

摘要： The invention provides a pulsation damping device in which an offset load on a pulsation suppression diaphragm is eliminated while an air supply valve and an air discharge valve are separately and independently juxtaposed, and an extendable and contractible portion of the pulsation suppression diaphragm is always caused to be straightly extendingly and contractingly deformed in the axial direction of a device body casing, whereby the response property of the opening and closing operations of the air supply and discharge valves can be improved and the pulsation suppressing performance can be ensured.

摘要翻译： 本发明提供了一种脉动抑制装置，其中消除了脉动抑制膜片上的偏移负载，同时空气供应阀和排气阀独立并置，并且脉动抑制膜片的可伸缩部分总是被 在装置主体壳体的轴向方向上直线地伸缩地变形，从而可以提高供气和排出阀的打开和关闭操作的响应特性，并且可以确保脉动抑制性能。