公开(公告)号：US07459828B2

公开(公告)日：2008-12-02

申请号：US10517071

申请日：2003-06-09

申请人： Valentin Cherednick ,  Michail Dvoesherstov ,  Yong Lim Choi

发明人： Valentin Cherednick ,  Michail Dvoesherstov ,  Yong Lim Choi

IPC分类号： H01L41/08

CPC分类号： G01L9/0025

摘要： The present invention discloses an SAW sensor device using a slit acoustic wave and a method thereof. The SAW sensor device using the slit acoustic wave includes a piezoelectric medium having a thin membrane at its one portion, a medium at the other portion, and a narrow slit which the slit acoustic wave passes through at its inside, an input IDT formed at the outer portion in the narrow slit of the piezoelectric medium, for transducing an electric input signal into the slit acoustic wave, and an output IDT formed at the outer portion opposite to the input IDT, for receiving the propagated slit acoustic wave and transducing the wave into an electric signal, whereby an external pressure transmitted to the device is sensed. The SAW sensor device using the slit acoustic wave and the method thereof can obtain intensity of the external pressure and viscosity and dielectric permittivity of liquid passing through the narrow slit by using correlations of frequency and velocity shifts of the slit acoustic wave generated in a resonator of the narrow slit.

摘要翻译： 本发明公开了一种使用狭缝声波的SAW传感器装置及其方法。 使用狭缝声波的SAW传感器装置包括其一部分具有薄膜的压电介质，另一部分的介质，狭缝声波在其内部通过的狭缝，形成在 压电介质的窄缝中的外部部分，用于将电输入信号转换成缝隙声波;以及形成在与输入IDT相对的外部的输出IDT，用于接收传播的狭缝声波并将波转换成 电信号，从而感测到传输到设备的外部压力。 使用狭缝声波的SAW传感器装置及其方法可以通过使用在谐振器中产生的狭缝声波的频率和速度偏移的相关性来获得通过狭缝的液体的外部压力和粘度和介电常数的强度 狭窄的狭缝。

公开(公告)号：US07233095B2

公开(公告)日：2007-06-19

申请号：US10517067

申请日：2003-06-25

申请人： Valentin Cherednick ,  Michail Dvoesherstov ,  Yong Lim Choi

发明人： Valentin Cherednick ,  Michail Dvoesherstov ,  Yong Lim Choi

IPC分类号： H01L41/08

CPC分类号： H03H9/0259

摘要： A single crystal substrate and a cutting method thereof are provided. The single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X′-axis, and the substrate farther has an Z′-axis perpendicular to the surface and a Y′-axis parallel to the surface and perpendicular to the X′-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X′, Y′ and Z′ being defined by Euler angles φ, θ and ψ, in which φ is in a range of 8°≦φ≦25°, θ in a range of 15°≦θ≦30°, and ψ is in a range of 55°≦ψ≦85°.

摘要翻译： 提供单晶基板及其切割方法。 单晶衬底包括具有SAW传播表面的朗氏体衬底; 以及在表面上具有用于发射和/或检测表面声波的电极的输入和输出IDT，其中表面波传播的方向平行于X'轴，并且所述衬底进一步具有垂直于所述表面的Z'轴 和平行于表面并垂直于X'轴的Y'轴，具有由修改的轴线X，Y和Z限定的晶体取向的斜长石基板，轴X'，Y'和Z'的相对取向为 由欧拉角phi，θ和psi定义，其中phi在15°<= 25°的范围内，θ在15°<θ= 30°的范围内，而psi在 55°<= psi <= 85°。