One-port surface elastic wave resonator on high permittivity substrate
    1.
    发明申请
    One-port surface elastic wave resonator on high permittivity substrate 审中-公开
    高介电常数衬底上的单端面弹性波谐振器

    公开(公告)号:US20170033840A1

    公开(公告)日:2017-02-02

    申请号:US15222506

    申请日:2016-07-28

    申请人: SENSEOR

    摘要: A surface elastic wave resonator comprises a piezoelectric material to propagate the surface elastic waves and a transducer inserted between a pair of reflectors comprising combs of interdigitated electrodes and having a number Nc of electrodes connected to a hot spot and an acoustic aperture W wherein the relative permittivity of the piezoelectric material is greater than about 15, a product of Nc·W/fa for the transducer being greater than 100 μm·MHz−1, where fa is the antiresonance frequency of the resonator. A circuit comprises a load impedance and a resonator according to the invention and having an electrical response manifesting as a peak in the coefficient of reflection S11 at a frequency of a minimum value of the parameter S11 that is lower than −10 dB, the antiresonance peak of the resonator being matched to the impedance of the load.

    摘要翻译: 表面弹性波谐振器包括用于传播表面弹性波的压电材料和插入在一对反射器之间的换能器,所述反射器包括交错电极梳和具有连接到热点的数量Nc的电极和声孔W,其中相对介电常数 的压电材料大于约15,传感器的Nc·W / fa的乘积大于100·MHz-1,其中fa是谐振器的反谐振频率。 电路包括根据本发明的负载阻抗和谐振器,并且具有以低于-10dB的参数S11的最小值的频率表现为反射系数S11中的峰值的电响应,反谐振峰 的谐振器与负载的阻抗匹配。

    Printed substrate, and electronic component having shield structure
    2.
    发明授权
    Printed substrate, and electronic component having shield structure 失效
    印刷基板和具有屏蔽结构的电子部件

    公开(公告)号:US07449978B2

    公开(公告)日:2008-11-11

    申请号:US11845990

    申请日:2007-08-28

    IPC分类号: H03H9/64 H05K5/04 H05K9/00

    摘要: In a fitting region for a SAW filter which includes langasite as its piezoelectric element, there are included an input side terminal electrode and an output side terminal electrode which are connected to an input terminal and to an output terminal of the SAW filter. To each of the terminal electrodes, at a position which is separated by just a predetermined distance from the fitting region of the SAW filter, there is connected a micro strip line which extends in mutually opposite directions along a direction which is parallel to the transmission direction of a frequency signal within the SAW filter. A slit is provided in the fitting region of the SAW filter and extends in a direction which intersects the transmission direction of the frequency signal within the SAW filter. A plurality of through holes are provided in the printed substrate and electrically connect together its surface and its rear surface which is grounded. Furthermore, there is provided a protective member which has a conductive surface and which is in contact with the surface of said filter, and said conductive surface of said protective member which is in contact with the surface of said filter is set so as to be of the same size as the surface of said filter, or so as to be smaller than it.

    摘要翻译: 在包括硅灰石作为其压电元件的SAW滤波器的嵌合区域中,包括连接到SAW滤波器的输入端子和输出端子的输入侧端子电极和输出侧端子电极。 对于每个端子电极,在与SAW滤波器的嵌合区域分开只有预定距离的位置处连接有沿着与传输方向平行的方向在相互相反的方向上延伸的微带线 的SAW滤波器内的频率信号。 在SAW滤波器的装配区域中设置有狭缝,并且在与SAW滤波器内的频率信号的传输方向相交的方向上延伸。 多个通孔设置在印刷基板中,并将其表面及其背面接地电连接在一起。 此外,提供了具有导电表面并与所述过滤器的表面接触的保护构件,并且与所述过滤器的表面接触的所述保护构件的所述导电表面被设定为 与所述过滤器的表面相同的尺寸,或者比其小。

    Single crystal substrate and cutting method thereof
    3.
    发明申请
    Single crystal substrate and cutting method thereof 有权
    单晶基板及其切割方法

    公开(公告)号:US20050146243A1

    公开(公告)日:2005-07-07

    申请号:US10517067

    申请日:2003-06-25

    IPC分类号: H03H9/25 H03H9/02

    CPC分类号: H03H9/0259

    摘要: Disclosed is a single crystal substrate and a cutting method thereof. A single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X′-axis, and the substrate further has an Z′-axis perpendicular to the surface and a Y′-axis parallel to the surface and perpendicular to the X′-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X′, Y′and Z′ being defined by Euler angles φ, θ and 104 , in which φ is in a range of 80°≦φ≦25°, θ is in a range of 15°≦θ≦30°, and ψ is in a range of 55°≦ψ≦85°.

    摘要翻译: 公开了单晶基板及其切割方法。 单晶衬底包括具有SAW传播表面的朗氏体衬底; 以及在表面上具有用于发射和/或检测表面声波的电极的输入和输出IDT,其中表面波传播的方向平行于X'轴,并且所述基板还具有垂直于所述表面的Z'轴 和平行于表面并垂直于X'轴的Y'轴,所述长方体衬底具有由修改的轴X,Y和Z限定的晶体取向,轴X',Y'和Z'的相对取向为 由欧拉角phi,θ和104定义,其中phi在80°<= phi <= 25°的范围内,θ在15°<θ= 30°的范围内,psi在一个范围内 55°<= psi <= 85°。

    Optimal cut for surface wave propagation on langasite substrate
    5.
    发明授权
    Optimal cut for surface wave propagation on langasite substrate 失效
    表面波传播的优化切割在长方体衬底上

    公开(公告)号:US6072264A

    公开(公告)日:2000-06-06

    申请号:US314047

    申请日:1999-05-18

    CPC分类号: H03H9/02606 H03H9/0259

    摘要: A lanthanum gallium silicate single crystal substrate, referred to as langasite, has a prescribed range of Euler angles for substrate and crystal orientation for improving signal processing for a surface acoustic wave (SAW) device. When a voltage is applied to an input interdigital transducer (IDT) of the SAW device, a surface acoustic wave is generated in the langasite piezoelectric substrate. The surface acoustic wave propagates in a direction generally perpendicular to electrodes of the IDT. The langasite crystal cut and wave propagation directions are defined which reduce insertion loss due to SAW transduction, diffraction, and beam steering. As a result, temperature stability for the SAW device is improved. A low power flow angle and reduced level of diffraction is also achieved.

    摘要翻译: 硅酸镓镧单晶衬底,被称为硅藻土,具有规定范围的欧拉角用于衬底和晶体取向,用于改善声表面波(SAW)器件的信号处理。 当电压施加到SAW器件的输入叉指式换能器(IDT)时,在朗氏体压电衬底中产生表面声波。 表面声波沿大致垂直于IDT的电极的方向传播。 定义了镧系晶体切割和波传播方向,其减少了由SAW转换,衍射和光束转向引起的插入损耗。 结果,改善了SAW器件的温度稳定性。 还实现了低功率流动角度和降低的衍射水平。

    Single crystal substrate and cutting method thereof
    7.
    发明授权
    Single crystal substrate and cutting method thereof 有权
    单晶基板及其切割方法

    公开(公告)号:US07233095B2

    公开(公告)日:2007-06-19

    申请号:US10517067

    申请日:2003-06-25

    IPC分类号: H01L41/08

    CPC分类号: H03H9/0259

    摘要: A single crystal substrate and a cutting method thereof are provided. The single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X′-axis, and the substrate farther has an Z′-axis perpendicular to the surface and a Y′-axis parallel to the surface and perpendicular to the X′-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X′, Y′ and Z′ being defined by Euler angles φ, θ and ψ, in which φ is in a range of 8°≦φ≦25°, θ in a range of 15°≦θ≦30°, and ψ is in a range of 55°≦ψ≦85°.

    摘要翻译: 提供单晶基板及其切割方法。 单晶衬底包括具有SAW传播表面的朗氏体衬底; 以及在表面上具有用于发射和/或检测表面声波的电极的输入和输出IDT,其中表面波传播的方向平行于X'轴,并且所述衬底进一步具有垂直于所述表面的Z'轴 和平行于表面并垂直于X'轴的Y'轴,具有由修改的轴线X,Y和Z限定的晶体取向的斜长石基板,轴X',Y'和Z'的相对取向为 由欧拉角phi,θ和psi定义,其中phi在15°<= 25°的范围内,θ在15°<θ= 30°的范围内,而psi在 55°<= psi <= 85°。

    Langasite single crystal ingot, substrate for piezoelectric device and method for manufacture thereof, and surface acoustic wave device
    8.
    发明授权
    Langasite single crystal ingot, substrate for piezoelectric device and method for manufacture thereof, and surface acoustic wave device 有权
    朗氏硅酸盐单晶锭,压电元件用基板及其制造方法以及表面声波装置

    公开(公告)号:US07090724B2

    公开(公告)日:2006-08-15

    申请号:US10297491

    申请日:2000-12-21

    IPC分类号: C30B15/20

    摘要: The contents by weight ratio of lanthanum oxide, gallium oxide, and silicon oxide, which are components, in the longitudinal cross-section and transverse cross-section of the straight part, excluding the shoulder part, of a Langasite single crystal ingot grown by pulling-up Langasite is within a range of ±0.05% with respect to the target amounts at all measured locations, and because of having a superior homogeneity in the content of components over the entire ingot, when used, for example, in a piezoelectric device such as an surface acoustic wave filter, has properties for industrial application that contribute to the stabilization of characteristics as well as reducing the costs.

    摘要翻译: 在通过拉伸生长的朗氏钛矿单晶锭的除了肩部之外的直线部分的纵向截面和横截面中作为部件的氧化镧,氧化镓和氧化硅的重量比 相对于所有测量位置处的目标量,朗格朗石在±0.05%的范围内,并且由于在整个锭中的组分含量具有优异的均匀性,例如在使用例如压电装置 作为表面声波滤波器,具有有助于特性稳定性以及降低成本的工业应用性质。

    Electronic device including langasite structure compound and method for making such devices
    10.
    发明授权
    Electronic device including langasite structure compound and method for making such devices 失效
    包括硅藻土结构化合物的电子器件及其制造方法

    公开(公告)号:US06455986B2

    公开(公告)日:2002-09-24

    申请号:US09848715

    申请日:2001-05-03

    IPC分类号: H01L4104

    摘要: An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A3BC3D2E14 wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure.

    摘要翻译: 一种电子器件包括由具有式A3BC3D2E14的有序兰格特结构化合物形成的压电层,其中A为锶,B为铌,C为镓,D为硅,E为氧。 至少一个电极连接到压电层,并且可以被配置为限定诸如SAW谐振器或滤波器或BAW谐振器或滤波器的器件。 有序的朗格列特结构化合物可以具有基本上完全有序的结构。