公开(公告)号：US07255749B2

公开(公告)日：2007-08-14

申请号：US10937014

申请日：2004-09-09

申请人： Yasuhito Inagaki ,  Mineo Shimizu ,  Yoshihiro Fujitani

发明人： Yasuhito Inagaki ,  Mineo Shimizu ,  Yoshihiro Fujitani

IPC分类号： B08B7/04

CPC分类号： H01L21/02052 ,  B08B3/00 ,  H01L21/67086 ,  Y10S438/906 ,  Y10T436/115831

摘要： In a cleaning treatment of a substrate using an aqueous solution of ammonium fluoride or a mixture of an aqueous solution of ammonium fluoride and hydrofluoric acid as a cleaning liquid, the cleaning liquid is replenished by at least one liquid selected from the group consisting of water, ammonia, aqueous ammonia, and an aqueous solution of ammonium fluoride with the lapse of time during the use of the cleaning liquid, in which the required amount of the liquid to be added according to the time lapse is calculated based on the measurement date and controlled, or the component concentration of the cleaning liquid is detected and the liquid is added according to the obtained result, so that not only can the substrate be cleaned uniformly and stably, but also a resource saving and a reduction in waste can be achieved.

摘要翻译： 在使用氟化铵水溶液或氟化铵和氢氟酸的水溶液的混合物作为清洗液的基材的清洗处理中，清洗液由至少一种选自水， 氨，氨水和氟化铵水溶液，在使用清洗液时随时间推移，其中根据测定日期计算要根据时间流逝添加的液体量，控制 ，或根据获得的结果检测清洗液的成分浓度，并添加液体，不仅可以均匀且稳定地清洗基板，而且可以实现资源节约和减少浪费。

公开(公告)号：US20050022845A1

公开(公告)日：2005-02-03

申请号：US10937014

申请日：2004-09-09

申请人： Yasuhito Inagaki ,  Mineo Shimizu ,  Yoshihiro Fujitani

发明人： Yasuhito Inagaki ,  Mineo Shimizu ,  Yoshihiro Fujitani

IPC分类号： B08B3/08 ,  B08B3/00 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306

CPC分类号： H01L21/02052 ,  B08B3/00 ,  H01L21/67086 ,  Y10S438/906 ,  Y10T436/115831

摘要： In a cleaning treatment of a substrate using an aqueous solution of ammonium fluoride or a mixture of an aqueous solution of ammonium fluoride and hydrofluoric acid as a cleaning liquid, the cleaning liquid is replenished by at least one liquid selected from the group consisting of water, ammonia, aqueous ammonia, and an aqueous solution of ammonium fluoride with the lapse of time during the use of the cleaning liquid, in which the required amount of the liquid to be added according to the time lapse is calculated based on the measurement date and controlled, or the component concentration of the cleaning liquid is detected and the liquid is added according to the obtained result, so that not only can the substrate be cleaned uniformly and stably, but also a resource saving and a reduction in waste can be achieved.

摘要翻译： 在使用氟化铵水溶液或氟化铵和氢氟酸的水溶液的混合物作为清洗液的基材的清洗处理中，清洗液由至少一种选自水， 氨，氨水和氟化铵水溶液，在使用清洗液时随时间推移，其中根据测定日期计算要根据时间流逝添加的液体量，控制 ，或根据获得的结果检测清洗液的成分浓度，并添加液体，不仅可以均匀且稳定地清洗基板，而且可以实现资源节约和减少浪费。