公开(公告)号：US07371997B2

公开(公告)日：2008-05-13

申请号：US11064755

申请日：2005-02-01

申请人： Toshiyuki Kobayashi ,  Yoshiro Koyama ,  Mitsukazu Takahashi

发明人： Toshiyuki Kobayashi ,  Yoshiro Koyama ,  Mitsukazu Takahashi

IPC分类号： F27B5/14 ,  A21B2/00

CPC分类号： H01L21/324 ,  H01L21/67115 ,  H01L21/681

摘要： In a thermal processing apparatus, using a lamp for heating a substrate, an opening is formed for a camera unit, which is used to image portions of an auxiliary ring supporting the substrate, to obtain the position of the center of the auxiliary ring. The camera further images the substrate to determine the center of the substrate before the thermal processing apparatus receives and places the substrate on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be designed to reduce overlaps of the auxiliary ring and the outer edge of the substrate while overlaps can be uniform over the entire circumference of the substrate to improve temperature uniformity of the substrate.

摘要翻译： 在热处理装置中，使用用于加热基板的灯，形成用于照相机单元的开口，用于对支撑基板的辅助环的部分进行成像，以获得辅助环的中心位置。 在热处理装置接收之前，照相机进一步对基板进行成像以确定基板的中心，并将基板放置在辅助环上。 热处理装置移动基板，使其中心与辅助环的中心一致，然后将其放置在其上。 因此，辅助环可以设计成减小辅助环和衬底的外边缘的重叠，同时在衬底的整个圆周上重叠可以是均匀的，以改善衬底的温度均匀性。

公开(公告)号：US20110209263A1

公开(公告)日：2011-09-01

申请号：US13126089

申请日：2009-10-29

申请人： Hidetoshi Suzuki ,  Yoshiro Koyama ,  Masami Tanaka ,  Chisei Kouno ,  Yoriko Atomi ,  Takashi Sakurai

发明人： Hidetoshi Suzuki ,  Yoshiro Koyama ,  Masami Tanaka ,  Chisei Kouno ,  Yoriko Atomi ,  Takashi Sakurai

IPC分类号： A41D7/00 ,  A41D13/00

CPC分类号： A41D13/0015 ,  A41B2400/38

摘要： A garment is provided with a main part which consists of a front body section, a back body section and sleeves extending from front and back body sections toward both arm sides over shoulders, and a pair of first tightening parts separately placed in right and left areas located at the positions of right and left deltoid muscles covering the boundary of the wearer's shoulder and upper arm in the back side, wherein the front and back body sections and the upper arm sections of the sleeves comprise at least two kinds of stretch materials, which differ in stretchability from each other, including a material for the main part and a material for the first tightening parts having a lower stretchability than the main part.

摘要翻译： 衣服具有主体部分，主体部分包括前身部分和背部主体部分以及从肩部和后部两侧延伸的套筒，以及一对分开放置在左右区域中的第一紧固部件 位于右侧和左侧三角肌的位置，覆盖了背侧的佩戴者的肩膀和上臂的边界，其中袖子的前身和后身部分和上臂部分包括至少两种拉伸材料，其中 拉伸性彼此不同，包括用于主要部分的材料和用于第一紧固部件的材料具有比主要部件低的拉伸性。