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公开(公告)号：US07371997B2
公开(公告)日：2008-05-13
申请号：US11064755
申请日：2005-02-01
CPC分类号： H01L21/324 , H01L21/67115 , H01L21/681
摘要： In a thermal processing apparatus, using a lamp for heating a substrate, an opening is formed for a camera unit, which is used to image portions of an auxiliary ring supporting the substrate, to obtain the position of the center of the auxiliary ring. The camera further images the substrate to determine the center of the substrate before the thermal processing apparatus receives and places the substrate on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be designed to reduce overlaps of the auxiliary ring and the outer edge of the substrate while overlaps can be uniform over the entire circumference of the substrate to improve temperature uniformity of the substrate.
摘要翻译： 在热处理装置中，使用用于加热基板的灯，形成用于照相机单元的开口，用于对支撑基板的辅助环的部分进行成像，以获得辅助环的中心位置。 在热处理装置接收之前，照相机进一步对基板进行成像以确定基板的中心，并将基板放置在辅助环上。 热处理装置移动基板，使其中心与辅助环的中心一致，然后将其放置在其上。 因此，辅助环可以设计成减小辅助环和衬底的外边缘的重叠，同时在衬底的整个圆周上重叠可以是均匀的，以改善衬底的温度均匀性。
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公开(公告)号：US06868302B2
公开(公告)日：2005-03-15
申请号：US10394895
申请日：2003-03-21
IPC分类号： H01L21/00 , H01L21/324 , H01L21/68 , G06F19/00
CPC分类号： H01L21/324 , H01L21/67115 , H01L21/681
摘要： In a thermal processing apparatus irradiating a substrate with light from a lamp for heating the substrate, an opening is formed in a reflector for mounting a camera unit. The camera unit images three portions of an auxiliary ring supporting the substrate, for obtaining the position of the center of the auxiliary ring before the thermal processing apparatus receives the substrate therein. The camera unit further images the substrate for obtaining the position of the center of the substrate before the thermal processing apparatus receives the substrate therein and places the same on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be so designed as to reduce overlaps of the auxiliary ring and the outer edge of the substrate while the overlaps can be rendered uniform over the entire circumference of the substrate for improving temperature uniformity of the substrate.
摘要翻译： 在用于加热基板的灯的光照射基板的热处理装置中，在用于安装相机单元的反射器中形成开口。 照相机单元将支撑衬底的辅助环的三个部分成像，以在热处理装置接收衬底之前获得辅助环的中心的位置。 相机单元进一步对基板进行成像，以在热处理设备接收基板之前获得基板中心的位置，并将其放置在辅助环上。 热处理装置移动基板，使其中心与辅助环的中心一致，然后将其放置在其上。 因此，辅助环可以设计成减小辅助环和基板的外边缘的重叠，同时可以在基板的整个圆周上使重叠部分均匀，以改善基板的温度均匀性。
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公开(公告)号：US20050149222A1
公开(公告)日：2005-07-07
申请号：US11064755
申请日：2005-02-01
IPC分类号： H01L21/00 , H01L21/324 , H01L21/68 , G06F19/00
CPC分类号： H01L21/324 , H01L21/67115 , H01L21/681
摘要： In a thermal processing apparatus irradiating a substrate with light from a lamp for heating the substrate, an opening is formed in a reflector for mounting a camera unit. The camera unit images three portions of an auxiliary ring supporting the substrate, for obtaining the position of the center of the auxiliary ring before the thermal processing apparatus receives the substrate therein. The camera unit further images the substrate for obtaining the position of the center of the substrate before the thermal processing apparatus receives the substrate therein and places the same on the auxiliary ring. The thermal processing apparatus moves the substrate so that the center thereof coincides with the center of the auxiliary ring, and thereafter places the former on the latter. Thus, the auxiliary ring can be so designed as to reduce overlaps of the auxiliary ring and the outer edge of the substrate while the overlaps can be rendered uniform over the entire circumference of the substrate for improving temperature uniformity of the substrate.
摘要翻译： 在用于加热基板的灯的光照射基板的热处理装置中，在用于安装相机单元的反射器中形成开口。 照相机单元将支撑衬底的辅助环的三个部分成像，以在热处理装置接收衬底之前获得辅助环的中心的位置。 相机单元进一步对基板进行成像，以在热处理设备接收基板之前获得基板中心的位置，并将其放置在辅助环上。 热处理装置移动基板，使其中心与辅助环的中心一致，然后将其放置在其上。 因此，辅助环可以设计成减小辅助环和基板的外边缘的重叠，同时可以在基板的整个圆周上使重叠部分均匀，以改善基板的温度均匀性。
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4.发明授权Substrate processing apparatus, control method adopted in substrate processing apparatus and program 有权基板处理装置，基板处理装置和程序中采用的控制方法公开(公告)号：US08859046B2
公开(公告)日：2014-10-14
申请号：US13271050
申请日：2011-10-11
CPC分类号： H01L21/6719 , H01L21/67017
摘要： A substrate processing apparatus according to the present invention comprises a plurality of processing chambers, discharge systems each provided in conjunction with one of the processing chambers and a common discharge system connected with the discharge systems of at least two processing chambers among the discharge systems provided in conjunction with the individual processing chambers. The common discharge allows a switch-over between a scrubbing common discharge system that discharges discharge gas from each processing chamber after scrubbing the discharge gas at a scrubbing means and a non-scrubbing common discharge system that directly discharges the discharge gas from the discharge system of the processing chamber without scrubbing at the scrubbing means. In this substrate processing apparatus, switch-over control is executed to select either the scrubbing common discharge system of the non-scrubbing common discharge system in correspondence to the type of processing executed in the processing chamber.
摘要翻译： 根据本发明的基板处理装置包括多个处理室，每个排放系统分别与处理室中的一个相连接，以及与排放系统中的至少两个处理室的排放系统连接的公共排放系统 与各个处理室结合。 公共放电允许在洗涤在洗涤装置处的排出气体之后排出来自每个处理室的排出气体的洗涤普通排放系统和从排放系统直接排出排放气体的非洗涤公共排放系统之间的切换 该处理室不在洗涤装置处洗涤。 在该基板处理装置中，执行切换控制，以对应于在处理室中执行的处理的类型来选择非擦洗普通放电系统的擦洗普通放电系统。
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公开(公告)号：US08226002B2
公开(公告)日：2012-07-24
申请号：US13195390
申请日：2011-08-01
CPC分类号： G11B5/00808 , G06K7/084 , G11B5/40
摘要： A conductive fixed static elimination member is provided in a before-magnetic head travel portion which guides a magnetic card to a magnetic card reader unit provided with a magnetic head, such that a protuberance portion thereof protrudes into a card travel groove through an opening formed in one of side walls, and has a conductive cleaning pad affixed to a surface thereof. The magnetic card inserted in the before-magnetic head travel portion is cleaned by the cleaning pad, and if the magnetic card has static electricity, it is possible to eliminate the static electricity by discharging the static electricity to the ground via the cleaning pad having conductivity, the fixed static elimination member, and a magnetic card reader fixing bracket.
摘要翻译： 导磁固定静电消除构件设置在磁头行进部分中，该磁头行进部分将磁卡引导到设置有磁头的磁卡读取器单元，使得其突起部分通过形成在其中的开口突出到卡行进槽中 一个侧壁，并且具有固定到其表面的导电清洁垫。 插入到前磁头行进部分中的磁卡被清洁垫清洁，并且如果磁卡具有静电，则可以通过具有导电性的清洁垫将静电放电到地面来消除静电 ，固定式静电消除构件和磁卡阅读器固定支架。
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6.发明授权公开(公告)号：US08173050B2
公开(公告)日：2012-05-08
申请号：US12331687
申请日：2008-12-10
IPC分类号： H01B1/20
CPC分类号： H05K1/092 , C09D11/322 , C09D11/52 , H05K3/125 , H05K2203/1131 , Y10S977/773 , Y10S977/775 , Y10S977/777 , Y10S977/788
摘要： A conductive pattern formation ink which can be stably ejected in the form of liquid droplets and form a conductive pattern having high reliability, a conductive pattern having high reliability, and a wiring substrate provided with the conductive pattern and having high reliability are provided. The conductive pattern formation ink is used for forming a conductive pattern by ejecting the ink in the form of liquid droplets on a surface of a ceramic molded body using a liquid droplet ejecting method, the ceramic molded body being made of a material containing ceramic particles and a binder. The ink contains a water-based dispersion medium, and metal particles dispersed in the water-based dispersion medium, wherein the water-based dispersion medium contains oxygen molecules and nitrogen molecules, and wherein when the water-based dispersion medium is analyzed using a gas chromatography method, a total amount of the oxygen and nitrogen molecules contained in the water-based dispersion medium is 12 ppm or less.
摘要翻译： 提供一种导电图案形成油墨，其能够以液滴的形式稳定地喷射，并形成具有高可靠性的导电图案，具有高可靠性的导电图案，以及具有导电图案并具有高可靠性的布线基板。 导电图案形成油墨用于通过使用液滴喷射方法将陶瓷成型体的表面上的液滴形式的墨水喷射而形成导电图案，陶瓷成形体由含有陶瓷颗粒的材料制成， 粘合剂 油墨含有水性分散介质和分散在水性分散介质中的金属颗粒，其中水性分散介质含有氧分子和氮分子，并且其中当使用气体分析水性分散介质时 色谱法中，水分散介质中含有的氧，氮分子的总量为12ppm以下。
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公开(公告)号：US07883170B2
公开(公告)日：2011-02-08
申请号：US11964851
申请日：2007-12-27
IPC分类号： B41J29/38
CPC分类号： B41J2/195 , B41J2/17513 , B41J2/17556 , B41J3/28 , B41J11/002
摘要： A liquid droplet ejection apparatus includes an ejection head having an ejection surface with an ejection outlet for ejecting a droplet of a functional liquid, a first container connected to the ejection head via a flow path to form a first space for containing the functional liquid that is to be supplied to the ejection head, a second container for containing the first container to form a second space between the first and the second containers, a pressure regulator for adjusting a pressure of the second space, and a temperature regulator for adjusting a temperature of the functional liquid of the first container, at least a part of the first container being made of a film deformed in accordance with an operation of the pressure regulator.
摘要翻译： 液滴喷射装置包括具有喷射表面的喷射头，喷射表面具有用于喷射功能液滴的喷射出口，第一容器经由流路连接到喷射头，以形成用于容纳功能液体的第一空间， 供给到喷射头的第二容器，用于容纳第一容器以在第一和第二容器之间形成第二空间的第二容器，用于调节第二空间的压力的压力调节器和用于调节第二空间的温度的温度调节器 第一容器的功能液体，第一容器的至少一部分由根据压力调节器的操作而变形的膜制成。
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公开(公告)号：US07875140B2
公开(公告)日：2011-01-25
申请号：US12260432
申请日：2008-10-29
申请人： Toshiyuki Kobayashi
发明人： Toshiyuki Kobayashi
CPC分类号： H05K3/4611 , H05K1/0306 , H05K3/125 , H05K3/1291 , H05K3/4629 , H05K2201/09781 , H05K2203/013 , H05K2203/1126
摘要： A method for manufacturing a multilayer ceramic substrate includes: a) discharging a droplet of a conductive ink on each of a plurality of green sheets so as to draw a liquid pattern made of the conductive ink on each of the green sheets; b) drying the liquid pattern so as to form a dry pattern; c) laminating the green sheets including the dry pattern so as to form a laminated body, and applying hydrostatic pressure on the laminated body that is decompress-packaged so as to form a pressure-bonded body; and d) firing the pressure-bonded body so as to form a multilayer ceramic substrate. In the method, in the step a), the liquid pattern is drawn by drawing a wiring liquid pattern and a dummy liquid pattern drawn along a vicinity of the wiring liquid pattern.
摘要翻译： 一种多层陶瓷基板的制造方法，其特征在于，具备：a）在多个生片的每一个上排出导电性油墨的液滴，在每片生片上吸引由导电性油墨构成的液体图案; b）干燥液体图案以形成干燥图案; c）将包括干燥图案的生片层压以形成层压体，并对被压缩包装的层压体施加静水压力以形成压接体; 以及d）烧结所述压接体以形成多层陶瓷基板。 在该方法中，在步骤a）中，通过绘制沿着布线液体图案附近绘制的布线液体图案和虚拟液体图案来绘制液体图案。
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公开(公告)号：US07750939B2
公开(公告)日：2010-07-06
申请号：US11377370
申请日：2006-03-17
申请人： Toshiyuki Kobayashi , Takayoshi Shimizu , Koji Oka
发明人： Toshiyuki Kobayashi , Takayoshi Shimizu , Koji Oka
CPC分类号： H04N5/23203 , H04N1/00204 , H04N5/23241 , H04N2101/00 , H04N2201/0075 , H04N2201/0084
摘要： An image photographing device (1), which converts an optical image of a subject into an electric signal by an image pick up device, and stores image data by the electric signal in an information recording medium (21), includes a communication interface (25), which communicates the image data, a determination device (31), which determines whether a device connected to the communication interface is an external device (2) or a release device (3), a communication process device (10), which conducts a communication process with the external device if the determination device determines that the external device is connected, and a photographing process device (10), which conducts a photographing process if the determination device determines that the release device is connected.
摘要翻译： 一种图像拍摄装置（1），其通过图像拾取装置将被摄体的光学图像转换为电信号，并且通过电信号将图像数据存储在信息记录介质（21）中，包括通信接口（25） ），确定连接到所述通信接口的设备是外部设备（2）还是释放设备（3）的确定设备（31），所述通信处理设备（10）执行 如果所述确定装置确定所述外部装置被连接，则与所述外部装置的通信处理;以及拍摄处理装置，如果所述确定装置确定所述释放装置被连接，则进行拍摄处理。
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10.发明授权公开(公告)号：US07541107B2
公开(公告)日：2009-06-02
申请号：US10921268
申请日：2004-08-19
CPC分类号： H01M8/1027 , C08G75/23 , C08G2650/02 , C08J5/2256 , C08J2381/06 , C08L81/06 , H01M4/881 , H01M8/1032 , H01M2300/0082 , Y02P70/56
摘要： An object of the present invention is to provide a highly durable solid polymer electrolyte that has a deterioration resistance equal to or higher than that of the fluorine-containing solid polymer electrolytes or a deterioration resistance sufficient for practical purposes, and can be produced at a low cost. According to the present invention, there is provided a solid polymer electrolyte comprising a polyether ether sulfone that is used as an electrolyte and has sulfoalkyl groups bonded to its aromatic rings and represented by the general formula —(CH2)n—SO3H.
摘要翻译： 本发明的目的是提供一种具有等于或高于含氟固体聚合物电解质的耐劣化性的耐久性高的固体聚合物电解质或用于实际目的的耐劣化性，并且可以在低 成本。 根据本发明，提供了一种固体聚合物电解质，其包含聚醚醚砜，其用作电解质并具有与其芳环键合且由通式 - （CH 2）n -SO 3 H表示的磺基烷基。
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