公开(公告)号：US06682658B2

公开(公告)日：2004-01-27

申请号：US09749038

申请日：2000-12-28

申请人： You Shin Ahn ,  Hu Kag Lee

发明人： You Shin Ahn ,  Hu Kag Lee

IPC分类号： H01G1300

CPC分类号： G02F1/13439

摘要： A pixel electrode employs a transparent electrode made from indium-zinc-oxide (IZO) that is capable of preventing damage and bending thereof. In a liquid crystal display device containing pixel electrodes, the transparent electrode is made from indium-zinc-oxide (IZO) having an amorphous structure so that it can be etched within a short period of time with a low concentration of etchant. Accordingly, it is possible to prevent damage and bending of the transparent electrode upon the patterning thereof.

公开(公告)号：US07158203B2

公开(公告)日：2007-01-02

申请号：US10029144

申请日：2001-12-28

申请人： Hye Young Kim ,  You Shin Ahn

发明人： Hye Young Kim ,  You Shin Ahn

IPC分类号： G02F1/1343 ,  G02F1/136 ,  G02F1/13

CPC分类号： G02F1/13439 ,  G02F1/136227

摘要： A method of fabricating a pixel electrode of a liquid crystal display uses an etchant that has low damage to metals to thereby enhance yields. In the method, a protective film covers a switching device, and a contact hole is defined at the protective film in such a manner to expose one electrode of the switching device. The pixel electrode, connected via the contact hole to the one electrode of the switching device, is formed on the protective film by using a low-temperature process in which a Hydrogen-containing gas is injected within a vacuum chamber. Accordingly, the etching process time can be shortened and damage to the metal can be virtually eliminated.

摘要翻译： 制造液晶显示器的像素电极的方法使用对金属具有低损伤的蚀刻剂，从而提高产量。 在该方法中，保护膜覆盖开关装置，并且在保护膜上限定接触孔，以露出开关装置的一个电极。 通过使用在真空室内注入含氢气体的低温工艺，在保护膜上形成通过接触孔与开关元件的一个电极连接的像素电极。 因此，可以缩短蚀刻处理时间，实际上可以消除金属的损坏。

公开(公告)号：US06624087B2

公开(公告)日：2003-09-23

申请号：US10138639

申请日：2002-05-06

申请人： Byung Tae Roh ,  You Shin Ahn

发明人： Byung Tae Roh ,  You Shin Ahn

IPC分类号： H01L2302

CPC分类号： H01L31/1884 ,  C09K13/06 ,  G02F1/13439 ,  H01L27/124 ,  Y02E10/50

摘要： An etchant for patterning indium tin oxide, wherein the etchant is a mixed solution of HCl, CH3COOH, and water, and a method of fabricating a liquid crystal display device are disclosed in the present invention. The method includes forming a gate electrode on a substrate, forming a gate insulating layer and an amorphous silicon layer on the gate electrode including the substrate, forming an active area by patterning the amorphous silicon layer, forming a source electrode and a drain electrode on the active area, forming a passivation layer on the source electrode and the drain electrode and the gate insulating layer, forming a contact hole exposing a part of the drain electrode, forming an indium tin oxide layer on the passivation layer, and forming an indium tin oxide electrode by selectively etching the indium tin oxide layer using a mixed solution of HCl, CH3COOH, and water as an etchant.

公开(公告)号：US07279765B2

公开(公告)日：2007-10-09

申请号：US10642174

申请日：2003-08-18

申请人： You Shin Ahn ,  Hu Kag Lee

发明人： You Shin Ahn ,  Hu Kag Lee

IPC分类号： H01L31/00 ,  H01G4/00

CPC分类号： G02F1/13439

摘要： A pixel electrode employs a transparent electrode made from indium-zinc-oxide (IZO) that is capable of preventing damage and bending thereof. In a liquid crystal display device containing pixel electrodes, the transparent electrode is made from indium-zinc-oxide (IZO) having an amorphous structure so that it can be etched within a short period of time with a low concentration of etchant. Accordingly, it is possible to prevent damage and bending of the transparent electrode upon the patterning thereof.

摘要翻译： 像素电极采用能够防止其损伤和弯曲的氧化铟锌（IZO）制成的透明电极。 在包含像素电极的液晶显示装置中，透明电极由具有非晶结构的氧化铟锌（IZO）制成，使得可以在较低浓度的蚀刻剂下在短时间内进行蚀刻。 因此，可以防止透明电极在其图案化时的损伤和弯曲。