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公开(公告)号:US20110101528A1
公开(公告)日:2011-05-05
申请号:US12696276
申请日:2010-01-29
申请人: Yousuke Akimoto , Makoto Wada
发明人: Yousuke Akimoto , Makoto Wada
IPC分类号: H01L23/48 , H01L21/768
CPC分类号: H01L23/53276 , H01L21/76802 , H01L21/76805 , H01L21/76838 , H01L21/76855 , H01L21/76876 , H01L23/5226 , H01L2924/0002 , Y10S977/72 , H01L2924/00
摘要: A semiconductor device according to one embodiment includes: a substrate; a wiring provided above the substrate and including a graphene nanoribbon layer comprising a plurality of laminated graphene nanoribbon sheets; and a wiring connecting member penetrating at least one of the plurality of graphene nanoribbon sheets for connecting the wiring and a conductive member above or below the wiring.
摘要翻译: 根据一个实施例的半导体器件包括:衬底; 设置在所述基板上方并且包括石墨烯纳米纤维层的布线,所述石墨烯纳米纤维层包括多个层叠的石墨烯纳米薄片; 以及布线连接构件,其穿透所述多个石墨烯纳米纤维板中的至少一个,用于将所述布线连接到所述布线上方或下方的导电构件。
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公开(公告)号:US08169085B2
公开(公告)日:2012-05-01
申请号:US12696276
申请日:2010-01-29
申请人: Yousuke Akimoto , Makoto Wada
发明人: Yousuke Akimoto , Makoto Wada
CPC分类号: H01L23/53276 , H01L21/76802 , H01L21/76805 , H01L21/76838 , H01L21/76855 , H01L21/76876 , H01L23/5226 , H01L2924/0002 , Y10S977/72 , H01L2924/00
摘要: A semiconductor device according to one embodiment includes: a substrate; a wiring provided above the substrate and including a graphene nanoribbon layer comprising a plurality of laminated graphene nanoribbon sheets; and a wiring connecting member penetrating at least one of the plurality of graphene nanoribbon sheets for connecting the wiring and a conductive member above or below the wiring.
摘要翻译: 根据一个实施例的半导体器件包括:衬底; 设置在所述基板上方并且包括石墨烯纳米纤维层的布线,所述石墨烯纳米纤维层包括多个层叠的石墨烯纳米薄片; 以及布线连接构件,其穿透所述多个石墨烯纳米纤维板中的至少一个,用于将所述布线连接到所述布线上方或下方的导电构件。
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