公开(公告)号：US06543988B2

公开(公告)日：2003-04-08

申请号：US09908528

申请日：2001-07-18

申请人： Yi-Li Hsiao ,  Cheng-Chieh Hung ,  Yu-Tsung Fu ,  Weng-Liang Fang

发明人： Yi-Li Hsiao ,  Cheng-Chieh Hung ,  Yu-Tsung Fu ,  Weng-Liang Fang

IPC分类号： B25J915

CPC分类号： H01L21/67259 ,  B25B5/147 ,  B25J9/107 ,  B25J15/10 ,  H01L21/68707

摘要： A wafer is carried on a blade supported on robotic arms. A plurality of guide clamps both move the wafer into a desired position on the blade and clamp the wafer in place during transport by the arms. The clamps are reciprocally mounted on the blade and are connected with and driven by a rotatable hub carried on the blade and rotated by the movement of the arms. Both the blade and the clamps include beveled surfaces that guide the wafer into place. The operation of the clamps is controlled by a laser that detects when the wafer is out of place or tilted on the blade.

摘要翻译： 晶片承载在机器人手臂上的刀片上。 多个引导夹具将晶片移动到刀片上的期望位置，并且在通过臂传送期间将晶片夹紧就位。 夹具相互安装在叶片上并与托架在叶片上的可旋转轮毂连接并由其驱动，并通过臂的运动而旋转。 刀片和夹具都包括将晶片引导到位的斜面。 夹具的操作由激光器控制，该激光器检测晶片何时不在位置或在叶片上倾斜。

公开(公告)号：US6113165A

公开(公告)日：2000-09-05

申请号：US166058

申请日：1998-10-02

申请人： Ming Chien Wen ,  Ching Hsu Ho ,  Yu Tsung Fu ,  Kwen Sz Lin

发明人： Ming Chien Wen ,  Ching Hsu Ho ,  Yu Tsung Fu ,  Kwen Sz Lin

IPC分类号： H01L21/687 ,  B65G65/00

CPC分类号： H01L21/68707 ,  Y10S294/907 ,  Y10S414/141

摘要： A self-sensing wafer holder in a robot blade is described which includes a holder body of generally elongated shape adapted for carrying a wafer on a top surface and at least three sensors positioned on the holder body sufficiently away from each other to form a plane that is covered by the wafer. The at least three sensors can be of the capacitive type, the optical type or the weight sensing type. The wafer holder is capable of determining whether a wafer is properly seated on top of the holder and automatically stopping the motion of the robot blade when a misplacement is detected by utilizing a sensing circuit including logic gates.

摘要翻译： 描述了一种机器人刀片中的自感晶片保持器，其包括适于在顶表面上承载晶片的大致细长形状的保持器主体和位于保持器主体上的至少三个传感器，该至少三个传感器足够远离彼此以形成平面， 被晶片覆盖。 至少三个传感器可以是电容型，光学类型或重量感测类型。 晶片保持器能够通过利用包括逻辑门的感测电路来确定晶片是否被正确地安置在保持器的顶部上并且当检测到错位时自动停止机器人刀片的运动。