公开(公告)号：US20200320741A1

公开(公告)日：2020-10-08

申请号：US16301279

申请日：2017-05-08

申请人： ÅBO AKADEMI (ÅBO AKADEMI UNIVERSITY) ,  HELSINGIN YLIOPISTO

发明人： Edward HÆGGSTRÖM ,  Ivan KASSAMAKOV ,  Anton NOLVI ,  Niklas SANDLER ,  Tapani VIITALA ,  Johan NYMAN

IPC分类号： G06T7/80 ,  G01B9/02 ,  G01B11/06 ,  G01S15/89 ,  G01S7/52

摘要： An artifact for determining resolution of imaging based on electromagnetic radiation, mechanical waves, or both is presented. The artifact includes a substrate and layers on top of the substrate. The layers include organic material and are stacked on each other in a partially overlapping way so that an edge of a first one of the layers is arranged to intersect with an edge of a second one of the layers. The layers constitute a three-dimensional surface topography where a groove defined by the edges of the first and second ones of the layers is tapering towards a point of intersection between the edges. The resolution is a minimum width of the tapering groove which is revealed by the imaging so that a pre-determined criterion is fulfilled.

公开(公告)号：US20170261309A1

公开(公告)日：2017-09-14

申请号：US15528679

申请日：2015-10-29

申请人： Åbo Akademi (Åbo Akademi University) ,  Helsingin Yliopisto

发明人： Edward HÆGGSTROM ,  Ivan KASSAMAKOV ,  Anton NOLVI ,  Tuomo YLITALO ,  Niklas SANDLER ,  Tapani VIITALA ,  Johan NYMAN

IPC分类号： G01B9/02

CPC分类号： G01B9/02072 ,  G01B9/0209

摘要： A method for calibrating electromagnetic radiation-based three-dimensional imaging includes: obtaining (501) a calibration imaging result at least partly on the basis of electromagnetic waves received from a calibration artifact, forming (502) calibration data on the basis of the calibration imaging result and a known thickness profile of the calibration artifact, and correcting (503), with the aid of the calibration data, an imaging result obtained at least partly on the basis of electromagnetic waves received from a sample to be imaged. The calibration artifact includes layers, for example Langmuir-Blodgett films, having pre-determined thicknesses and stacked on each other so as to achieve the pre-determined thickness profile of the calibration artifact. A three-dimensional imaging system configured to carry out the method.