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公开(公告)号：US11699988B2
公开(公告)日：2023-07-11
申请号：US16993198
申请日：2020-08-13
发明人： Shiyang Cheng , Ke Wu , Yang Li , Chao Wang
CPC分类号： H03H9/175 , H03H3/02 , H03H9/13 , H03H2003/025
摘要： A resonator includes a silicon substrate, a bottom electrode stacked on a portion of the silicon substrate, a piezoelectric layer covering the bottom electrode and another portion of the silicon substrate, a top electrode stacked on the piezoelectric layer, and a Bragg reflecting ring. The Bragg reflecting ring is formed on a side of the piezoelectric layer connected to the top electrode and surrounds the top electrode. The Bragg reflecting ring includes a Bragg high-resistivity layer and a Bragg low-resistivity layer alternately arranged along the radial direction of the Bragg reflecting ring. An acoustic impedance of the Bragg high-resistivity layer is greater than an acoustic impedance of the Bragg low-resistivity layer. The Bragg reflecting ring forms reflection surfaces to reflect the laterally propagating clutter waves, thereby suppressing the parasitic mode in the working frequency band, improving the frequency response curve of the resonator and the overall performance of the resonator.
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公开(公告)号：US20230170874A1
公开(公告)日：2023-06-01
申请号：US17566711
申请日：2021-12-31
发明人： Shuai Yang , Lirong Zhang , Ke Wu , Zhiqiang Zhuang , Chao Wang
CPC分类号： H03H9/02118 , H03H9/175
摘要： The present invention provides a piezoelectric film acoustic resonator, which comprises a substrate, a first electrode disposed over the substrate, a piezoelectric film disposed over the substrate and covering at least a portion of the first electrode and a second electrode disposed on a surface of the piezoelectric film away from the first electrode, one end of the first electrode extends in the direction away from the piezoelectric film to form a first extended pad, one end of the second electrode extends in the direction away from the first extended pad to form a second extended pad, the first extended pad comprises a first protruding reflection grating on the surface away from the substrate, the second extended pad comprises a second protruding reflection grating on the surface away from the substrate. The configuration can reduce the impact on acoustic performance while improving the quality factor.
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