-
公开(公告)号：US11870417B2
公开(公告)日：2024-01-09
申请号：US16986305
申请日：2020-08-06
CPC分类号： H03H9/02433 , H03H9/09 , H03H2009/0248 , H03H2009/02283
摘要： The present disclosure provides a differential resonator and a MEMS sensor. The differential resonator includes a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator through the coupling mechanism, and the first resonator and the second resonator are connected with the substrate and are able to be displaced relative to the substrate. The coupling mechanism includes a coupling arm, a support shaft, a first connecting piece and a second connecting piece. The coupling arm includes a first force arm, a second force arm and a coupling portion. The support shaft has one end connected with the substrate, and one other end connected with the coupling portion. The first force arm is connected with the first resonator through the first connecting piece, and the second force is connected with the second resonator through the second connecting piece.
-
公开(公告)号：US11674804B2
公开(公告)日：2023-06-13
申请号：US17566733
申请日：2021-12-31
发明人： Shan Yang , Zhan Zhan , Hongtao Peng , Zhao Ma , Xiao Kan , Yang Li , Kahkeen Lai , Yan Hong , Veronica Tan
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： The present invention provides a MEMS gyroscope having internal coupling beam, an external coupling beam, a drive structure and a detection structure. The drive structure includes multiple driving weights, and the detection structure includes multiple testing weights. The drive structure further includes a first decoupling structure and a first transducer. The first decoupling structure is arranged on the side of the driving weight far away from the internal coupling beam, and the first transducer excites the driving weight to vibrate. The MEMS gyroscope of the present invention can fully increase the layout area of the first transducer, thereby realizing a larger vibration amplitude under a small driving voltage, thereby increasing the sensitivity.
-
公开(公告)号：US20230412988A1
公开(公告)日：2023-12-21
申请号：US17969668
申请日：2022-10-19
发明人： Qiang Dan , Yu Shen , Yiwei Zhou , Yang Li
IPC分类号： H04R17/00
CPC分类号： H04R17/00 , H04R2201/003
摘要： The invention provides a MEMS speaker including a substrate enclosing a cavity, a cantilever beam at least partially suspended above the cavity, a piezoelectric actuator away from the cavity, a polymer layer away from the cavity and attached to the cantilever beam and the piezoelectric actuator for completely covering the cantilever beam, the piezoelectric actuator and the cavity, and a piezoelectric composite vibration structure formed by the polymer layer. The cantilever beam includes a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section away from the first section, an end of the third section away from the second section being suspended; and the piezoelectric actuator is only fixed with the third section.
-
公开(公告)号：US20230130249A1
公开(公告)日：2023-04-27
申请号：US17566733
申请日：2021-12-31
发明人： Shan Yang , Zhan Zhan , Hongtao Peng , Zhao Ma , Xiao Kan , Yang Li , Kahkeen Lai , Yan Hong , Veronica Tan
IPC分类号： G01C19/5712
摘要： The present invention provides a MEMS gyroscope having internal coupling beam, an external coupling beam, a drive structure and a detection structure. The drive structure includes multiple driving weights, and the detection structure includes multiple testing weights. The drive structure further includes a first decoupling structure and a first transducer. The first decoupling structure is arranged on the side of the driving weight far away from the internal coupling beam, and the first transducer excites the driving weight to vibrate. The MEMS gyroscope of the present invention can fully increase the layout area of the first transducer, thereby realizing a larger vibration amplitude under a small driving voltage, thereby increasing the sensitivity.
-
公开(公告)号：US20230110948A1
公开(公告)日：2023-04-13
申请号：US17566677
申请日：2021-12-30
发明人： Xiao Kan , Zhao Ma , Shan Yang , Zhan Zhan , Hongtao Peng , Yang Li , Veronica Tan , Yan Hong , Kahkeen Lai
IPC分类号： G01C19/5762
摘要： The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.
-
公开(公告)号：US11784624B2
公开(公告)日：2023-10-10
申请号：US16986306
申请日：2020-08-06
CPC分类号： H03H9/02433 , H03H9/09 , H03H2009/0248 , H03H2009/02291
摘要： The present disclosure provides a differential resonator and a MEMS sensor. The differential resonator includes a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator, and the first resonator and the second resonator are movably connected with the substrate. The coupling mechanism includes a first guide beam, a second guide beam, a first coupling beam, a second coupling beam, a first connecting piece and a second connecting piece. The first guide beam and the second guide beam are arranged on two opposite sides of a direction perpendicular to a vibration direction of the first resonator or the second resonator. The first coupling beam is connected with the first guide beam, the second guide beam and the first resonator. The second coupling beam is connected with the first guide beam, the second guide beam and the second resonator.
-
公开(公告)号：US11891297B2
公开(公告)日：2024-02-06
申请号：US16995791
申请日：2020-08-17
发明人： Ze Tao , Wooicheang Goh , Zhan Zhan , Kahkeen Lai , Yang Li
IPC分类号： B81B3/00
CPC分类号： B81B3/0072 , B81B3/0021 , B81B3/0062
摘要： The present invention provides a motion control structure and a actuator. The motion control structure includes a motion platform, a first actuator having a first execution unit arranged on opposite sides of the motion platform along an X-axis direction and a second execution unit arranged on opposite sides of the motion platform along a Y-axis direction. The first execution unit includes a first actuating element displaced along the X-axis direction. The second execution unit includes a second actuating element displaced along the Y-axis direction. A second actuator surrounds an inner periphery of the motion platform and includes a third execution unit having an assembly portion displaced along the Z-axis direction. The motion control structure of the invention has the advantages that the motion platform can be driven to realize motion in six degrees of freedom.
-
公开(公告)号：US11699988B2
公开(公告)日：2023-07-11
申请号：US16993198
申请日：2020-08-13
发明人： Shiyang Cheng , Ke Wu , Yang Li , Chao Wang
CPC分类号： H03H9/175 , H03H3/02 , H03H9/13 , H03H2003/025
摘要： A resonator includes a silicon substrate, a bottom electrode stacked on a portion of the silicon substrate, a piezoelectric layer covering the bottom electrode and another portion of the silicon substrate, a top electrode stacked on the piezoelectric layer, and a Bragg reflecting ring. The Bragg reflecting ring is formed on a side of the piezoelectric layer connected to the top electrode and surrounds the top electrode. The Bragg reflecting ring includes a Bragg high-resistivity layer and a Bragg low-resistivity layer alternately arranged along the radial direction of the Bragg reflecting ring. An acoustic impedance of the Bragg high-resistivity layer is greater than an acoustic impedance of the Bragg low-resistivity layer. The Bragg reflecting ring forms reflection surfaces to reflect the laterally propagating clutter waves, thereby suppressing the parasitic mode in the working frequency band, improving the frequency response curve of the resonator and the overall performance of the resonator.
-
公开(公告)号：US11310606B2
公开(公告)日：2022-04-19
申请号：US16986304
申请日：2020-08-06
发明人： Bei Tong , Zhan Zhan , Yang Li , Kahkeen Lai , Xiaohui Zhong , Lian Duan
摘要： The present disclosure provides an MEMS microphone including a base having a rear cavity and a capacitor system disposed on the base. The capacitor system includes a rear plate and a diaphragm that are spaced relatively apart to form an acoustic cavity. A piezoelectric diaphragm is attached to a side of the diaphragm, the side being away from the acoustic cavity. The piezoelectric diaphragm, under the deformation effect of the diaphragm, deforms to generate and output charges. Therefore, the MEMS microphone can output two groups of electrical signals, one group of electrical signals output by the capacitor system and one group of electrical signals output by the piezoelectric diaphragm, thereby sensitivity of the microphone is improved.
-
公开(公告)号：US11662206B2
公开(公告)日：2023-05-30
申请号：US17566677
申请日：2021-12-30
发明人： Xiao Kan , Zhao Ma , Shan Yang , Zhan Zhan , Hongtao Peng , Yang Li , Veronica Tan , Yan Hong , Kahkeen Lai
IPC分类号： G01C19/5762
CPC分类号： G01C19/5762
摘要： The present invention provides a micromachined gyroscope, including: a base; an anchor point fixed to the base; a number of vibration structures; and a drive structure used for driving the vibration structure to vibrate in a x-y plane along a ring direction. The drive structure includes at least four groups arranged at intervals along the ring direction and symmetrical about an x axis and a y axis. The micromachined gyroscope works in two vibration modes interchanging with each other, including a driving mode status working in a first mode status and a testing mode status working in a second mode status. By virtue of the configuration described in the invention, the micromachined gyroscope can realize three-axis detection at the same time, and greatly improves the quality utilization rate of the vibration structure.
-
-
-
-
-
-
-
-
-
搜索结果
12 条记录 (耗时 0.017 秒)
