公开(公告)号：US10927460B2

公开(公告)日：2021-02-23

申请号：US16302895

申请日：2017-02-27

申请人： ADEKA CORPORATION

发明人： Hiroki Sato ,  Naoki Yamada ,  Tsubasa Shiratori ,  Haruyoshi Sato

IPC分类号： C23C16/455 ,  C23C16/40

摘要： A raw material for forming a thin film that includes a compound represented by General Formula (1) below. In the formula, R1 represents a linear or branched alkyl group having 2 to 4 carbon atoms; R2 to R5 each independently represent a linear or branched alkyl group having 1 to 4 carbon atoms; A represents an alkanediyl group having 1 to 4 carbon atoms; and M represents titanium, zirconium or hafnium. Provided that when M represents zirconium, A represents an alkanediyl group having 3 or 4 carbon atoms. When M represents titanium or hafnium, it is preferred that A represents an alkanediyl group having 2 or 3 carbon atoms. When M represents zirconium, it is preferred that A represent an alkanediyl group having 3 carbon atoms.