-
1.发明授权Sample holder of electron beam exposure apparatus and electron beam exposure method using the same 有权电子束曝光装置的样品架和使用其的电子束曝光方法公开(公告)号：US08859993B2
公开(公告)日：2014-10-14
申请号：US13967970
申请日：2013-08-15
Applicant: Advantest Corporation
Inventor： Hirofumi Hayakawa , Akiyoshi Tsuda
IPC: H01J37/20 , H01J37/317
CPC classification number: H01J37/20 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/2007 , H01L21/6833 , H01L21/68728
Abstract: A sample holder to be disposed between an electrostatic chuck and a sample smaller than the upper surface of the electrostatic chuck is provided, the sample holder including: a base plate formed in the same size as the upper surface of the electrostatic chuck; a sample placement portion located on the upper surface of the base plate, and designed to place the sample thereon; and a circumferential portion being a portion of the upper surface of the base plate other than the sample placement portion, and having a conductive material exposed to the outside.
Abstract translation: 设置在静电卡盘和小于静电卡盘的上表面的样本之间的样品保持器，所述样品保持器包括：形成为与所述静电卡盘的上表面相同尺寸的基板; 位于所述基板的上表面上并被设计成将样品放置在其上的样品放置部分; 以及作为除了样品放置部以外的基板的上表面的一部分的周向部，并且具有暴露于外部的导电材料。
-
2.发明申请SAMPLE HOLDER OF ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM EXPOSURE METHOD USING THE SAME 有权电子束曝光装置的样品保持器和使用该光束的电子束曝光方法公开(公告)号：US20140048720A1
公开(公告)日：2014-02-20
申请号：US13967970
申请日：2013-08-15
Applicant: ADVANTEST CORPORATION
Inventor： Hirofumi Hayakawa , Akiyoshi Tsuda
IPC: H01J37/20 , H01J37/317
CPC classification number: H01J37/20 , B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/2007 , H01L21/6833 , H01L21/68728
Abstract: A sample holder to be disposed between an electrostatic chuck and a sample smaller than the upper surface of the electrostatic chuck is provided, the sample holder including: a base plate formed in the same size as the upper surface of the electrostatic chuck; a sample placement portion located on the upper surface of the base plate, and designed to place the sample thereon; and a circumferential portion being a portion of the upper surface of the base plate other than the sample placement portion, and having a conductive material exposed to the outside.
Abstract translation: 设置在静电卡盘和小于静电卡盘的上表面的样本之间的样品保持器，所述样品保持器包括：形成为与所述静电卡盘的上表面相同尺寸的基板; 位于所述基板的上表面上并被设计成将样品放置在其上的样品放置部分; 以及作为除了样品放置部以外的基板的上表面的一部分的周向部，并且具有暴露于外部的导电材料。
-
Search Results
2
records
(took 0.009 seconds)
