公开(公告)号：US20030052270A1

公开(公告)日：2003-03-20

申请号：US10274328

申请日：2002-10-18

Applicant: ADVANTEST CORPORATION

Inventor： Jun Matsumoto ,  Takayuki Nakamura

IPC: H01J037/28

CPC classification number: H01J37/28 ,  G01B15/00 ,  H01J2237/2816

Abstract: An electron beam length-measurement apparatus for measuring a length of a predetermined portion of an object by using an electron beam, includes: an electron gun for emitting the electron beam; a deflecting unit for deflecting the electron beam; an object holding unit on which the object is to be placed; a detector for detecting electrons that are scattered by the electron beam; a memory for storing layout position information that specifies a layout position at which the predetermined portion of the object; a length-measurement scanning controller for controlling the deflecting unit to scan with the electron beam to allow the layout position on the object to be irradiated with the electron beam; and a measurement unit operable to measure the length of the predetermined portion of the object based on a changing manner of the electrons successively detected by the detector while the length-measurement scanning controller scans with the electron beam.

Abstract translation: 一种用于通过使用电子束测量物体的预定部分的长度的电子束长度测量装置，包括：用于发射电子束的电子枪; 用于偏转电子束的偏转单元; 物体保持单元，待放置物体; 用于检测由电子束散射的电子的检测器; 存储器，用于存储指定对象的预定部分的布局位置的布局位置信息; 长度测量扫描控制器，用于控制偏转单元用电子束扫描以允许物体上的布局位置用电子束照射; 以及测量单元，其可操作以基于当长度测量扫描控制器用电子束扫描时由检测器连续检测的电子的改变方式来测量物体的预定部分的长度。