公开(公告)号：US20200310220A1

公开(公告)日：2020-10-01

申请号：US16793561

申请日：2020-02-18

Applicant: ADVANTEST Corporation

Inventor： Takao SAKURAI ,  Shin MASUDA ,  Tomoki JOICHI ,  Masao FUJINO

IPC: G02F1/335 ,  G02F1/355

Abstract: A laser beam output apparatus includes a pulsed laser output section, an optical path determining section, a wavelength changing section, and a multiplexer. The pulsed laser output section outputs a laser beam having a predetermined wavelength as first pulses. The optical path determining section receives the first pulses and determines one among a plurality of optical paths for each of the first pulses for output. The wavelength changing section receives light beams traveling, respectively, through the plurality of optical paths and changes the light beams to have their respective different wavelengths for output. The multiplexer multiplexes outputs from the wavelength changing section.

公开(公告)号：US20130199310A1

公开(公告)日：2013-08-08

申请号：US13717722

申请日：2012-12-18

Applicant: ADVANTEST CORPORATION

Inventor： Masao FUJINO ,  Toshiaki HAYAKAWA

IPC: G01L1/24

CPC classification number: G01L1/241

Abstract: To measure contact pressure of each of a plurality of small protrusions arranged at a narrow pitch and contacting a flat surface, provided is a contact pressure detection apparatus comprising a sensor section that is contacted by a target and has pressure applied thereto by the target; a light source section that radiates light with a wavelength causing Raman scattering in the sensor section to which the pressure is applied; and a detecting section that receives light from the sensor section and detects the pressure between the sensor section and the target. Also provided is a contact point pressure measurement apparatus that measures contact pressure of an electrode of a device under test, comprising: a fixing section that has the device under test mounted thereon and fixes the electrode of the device under test in a manner to press against the sensor section; and the contact pressure detection apparatus.

Abstract translation: 为了测量以窄间距布置并接触平坦表面的多个小突起中的每一个的接触压力，提供了一种接触压力检测装置，其包括传感器部分，所述传感器部分与靶接触并且由目标施加到其上的压力; 光源部，其在施加有压力的传感器部中散射具有引起拉曼散射的波长的光; 以及检测部，其从所述传感器部接收光，并检测所述传感器部与所述目标之间的压力。 还提供了一种接触点压力测量装置，其测量被测设备的电极的接触压力，该接触点压力测量装置包括：固定部件，其具有安装在其上的被测器件，并以被压制的方式固定被测器件的电极 传感器部分; 和接触压力检测装置。