公开(公告)号：US20170314134A1

公开(公告)日：2017-11-02

申请号：US15528476

申请日：2015-11-18

Applicant: AIXTRON SE

Inventor： Walter FRANKEN ,  Bernhard ZINTZEN ,  Henricus Wilhelmus Aloysius JANSSEN

IPC: C23C16/54 ,  C23C16/455 ,  C23C14/54 ,  B01J3/02 ,  C23C14/12 ,  B01J3/03 ,  C23C16/52 ,  C23C14/56

Abstract: A CVD or PVD coating device comprises a housing and a gas inlet organ secured to the housing via a retaining device, the gas inlet organ having a gas outlet surface with gas outlet openings. The retaining device is only secured at its horizontal edge to the housing so as to stabilize the retaining device with respect to deformations and temperature. The gas inlet organ is secured, at a plurality of suspension points, to the retaining device by means of a plurality of hanging elements distributed over the entire horizontal surface of the retaining device. The retaining device has mechanical stabilization elements formed by a retaining frame having vertical walls that are interconnected at vertical connection lines. An actively cooled heat shield is situated between the retaining device and the gas inlet organ.

公开(公告)号：US20160079104A1

公开(公告)日：2016-03-17

申请号：US14785308

申请日：2014-04-16

Applicant: AIXTRON SE

Inventor： Martin FREUNDT ,  Walter FRANKEN

IPC: H01L21/677 ,  F16J15/02 ,  B25J11/00

CPC classification number: H01L21/67778 ,  B25J11/0095 ,  F16J15/02 ,  F16K3/0227 ,  H01L21/67126 ,  H01L21/67775

Abstract: The invention concerns a transport module (2) for purposes of loading and unloading a process module (1) of a semiconductor production device, with a housing (3), which has a chamber (4) that can be evacuated, which has an opening (6) that can be closed in a gas-tight manner by a closure device (5), which opens out into a coupling duct (7) associated with the transport module (2), which coupling duct is connected with a flange plate (9) using an elastic intermediate element (8), wherein the flange plate (9) can be seated in a plane parallel, sealing manner on a flange plate (11) of a coupling duct (10) associated with the process module (1), such that after opening the closure device (5) an evacuated loading and unloading duct to the process module (1) is created, wherein a mounting section of the intermediate element (8) is connected with the wall (12, 12′) of the coupling duct (7). Provision is made for the mounting sections to be spaced apart from one another in the radial direction, with respect to the axis of the coupling duct (7), by a deformation zone.

Abstract translation: 本发明涉及一种运输模块（2），用于装载和卸载半导体生产装置的处理模块（1），其具有壳体（3），壳体（3）具有可以抽真空的腔室（4），其具有开口 （6），其可以通过封闭装置（5）以气密方式封闭，封闭装置（5）打开到与输送模块（2）相关联的联接管道（7）中，该联接管道与凸缘板（ 9）使用弹性中间元件（8），其中所述凸缘板（9）可以平行地密封在与所述过程模块（1）相关联的联接管道（10）的法兰盘（11）上的平面中， ，使得在打开所述封闭装置（5）之后，产生到所述处理模块（1）的抽真空装载和卸载管道，其中所述中间元件（8）的安装部分与所述中间元件（8）的壁（12,12'）连接 联接管道（7）。 设置安装部分通过变形区域在径向方向上相对于联接通道（7）的轴线彼此间隔开。