公开(公告)号：US20150318403A1

公开(公告)日：2015-11-05

申请号：US14700991

申请日：2015-04-30

Applicant: ALCOA INC.

Inventor： Thomas L. Levendusky ,  Kirit Shah ,  Marcia Gregory ,  Jeff S. VanBrookhoven ,  Miltiadis K. Hatalis

IPC: H01L29/786 ,  H01L29/51 ,  H01L21/477 ,  H01L29/66

CPC classification number: H01L29/78603 ,  H01L21/477 ,  H01L29/512 ,  H01L29/66742 ,  H01L29/7869

Abstract: A substrate comprises of a recrystallized aluminum alloy. An organic polymer layer coats the top surface of the aluminum substrate. A layer of one of: SiO2, SiN and Al2O3 is on the organic polymer and at least one electrode is adhered to the layer of one of: SiO2, SiN and Al2O3. A method comprises depositing an organic polymer on an aluminum substrate, annealing the aluminum substrate; depositing a layer of one of SiO2, SiN and Al2O3 on the organic polymer; and adhering an electrode to the layer of one of: SiO2, SiN and Al2O3.

Abstract translation: 基材由再结晶铝合金构成。 有机聚合物层包覆铝基板的顶表面。 SiO 2，SiN和Al 2 O 3中的一层在有机聚合物上，并且至少一个电极粘附到SiO 2，SiN和Al 2 O 3之一层上。 一种方法包括在铝基板上沉积有机聚合物，退火铝基板; 在有机聚合物上沉积SiO 2，SiN和Al 2 O 3层; 并将电极粘附到SiO 2，SiN和Al 2 O 3之一的层上。