公开(公告)号：US20150008544A1

公开(公告)日：2015-01-08

申请号：US14321947

申请日：2014-07-02

Applicant: ALPS ELECTRIC CO., LTD.

Inventor： Hisayuki YAZAWA ,  Katsuya KIKUIRI ,  Toru TAKAHASHI

IPC: B81B7/00 ,  G01L9/00

CPC classification number: G01L9/0054 ,  B81B3/0086 ,  B81B2201/0264

Abstract: A physical quantity sensor detects a physical quantity using a piezoresistive effect and includes a first-conductivity-type well layer disposed on a first insulating layer, a plurality of second-conductivity-type piezoresistive layers disposed on a surface side of the first-conductivity-type well layer, and a second-conductivity-type isolation layer disposed between the plurality of second-conductivity-type piezoresistive layers so as to pass through the first-conductivity-type well layer from a surface of the first-conductivity-type well layer to a surface of the first insulating layer.

Abstract translation: 物理量传感器使用压阻效应来检测物理量，并且包括设置在第一绝缘层上的第一导电型阱层，设置在第一导电型阱层的表面侧的多个第二导电型压阻层， 以及设置在所述多个第二导电型压阻层之间的第二导电型隔离层，以从所述第一导电型阱层的表面通过所述第一导电型阱层 到第一绝缘层的表面。