公开(公告)号：US20250038016A1

公开(公告)日：2025-01-30

申请号：US18707165

申请日：2022-09-28

Applicant: AP SYSTEMS INC.

Inventor： Dae Ryong LEE ,  Sang Hyun JI ,  Chang Kyo KIM

IPC: H01L21/67 ,  H01L21/268 ,  H01L21/66

Abstract: The present inventive concept relates to a substrate processing apparatus and a substrate processing method, which can accurately measure temperature in even a low-temperature region, thus making it possible to efficiently manage heat. The substrate processing apparatus comprises: a chamber for providing a processing space in which a substrate is processed; a substrate support provided in the processing space of the chamber in order to support the substrate; a heater provided with a plurality of semiconductor laser modules that emit light toward a first surface of the substrate; and a pyrometer which is provided on the side of a second surface of the substrate facing the first surface and detects light emitted from the substrate to measure the temperature of the substrate. The main light-emitting wavelength of the plurality of semiconductor laser modules may be shorter than the measurement wavelength of the pyrometer.

公开(公告)号：US20250076906A1

公开(公告)日：2025-03-06

申请号：US18803348

申请日：2024-08-13

Applicant: AP SYSTEMS INC.

Inventor： Sang Hyun JI ,  Dae Ryong LEE ,  Yong Soo MOON

IPC: G05D23/20 ,  H01L21/67

Abstract: The present disclosure relates to a power control device for temperature control capable of phase control compensation according to power fluctuations, a thermal processing system having the same, and a temperature control method for the thermal processing system. The power control device for temperature control includes a power control unit configured to control an amount of power supplied to a heating source by controlling a phase of AC power supplied from a power source and a power measurement unit connected to the power source and configured to measure the AC power, wherein the power control unit controls the phase of the AC power by compensating a phase angle according to a difference between a reference power value and the measured value measured by the power measurement unit.