公开(公告)号：US20200219720A1

公开(公告)日：2020-07-09

申请号：US16812593

申请日：2020-03-09

Applicant: APPLIED MATERIALS, INC.

Inventor： BEN-LI SHEU ,  BENCHERKI MEBARKI ,  JOUNG JOO LEE ,  ISMAIL EMESH ,  ROEY SHAVIV ,  XIANMIN TANG

IPC: H01L21/027 ,  H01L21/768 ,  H01L21/02 ,  H01L21/285 ,  C23C16/455

Abstract: Methods and apparatus for asymmetric deposition of a material on a structure formed on a substrate are provided herein. In some embodiments, a method for asymmetric deposition of a material includes forming a plasma from a process gas comprising ionized fluorocarbon (CxFy) particles, depositing an asymmetric fluorocarbon (CxFy) polymer coating on a first sidewall and a bottom portion of an opening formed in a first dielectric layer using angled CxFy ions, depositing a metal, metallic nitride, or metallic oxide on a second sidewall of the opening, and removing the CxFy polymer coating from the first sidewall and the bottom portion of the opening to leave an asymmetric deposition of the metal, metallic nitride, or metallic oxide on the structure.

公开(公告)号：US20190287791A1

公开(公告)日：2019-09-19

申请号：US15924821

申请日：2018-03-19

Applicant: APPLIED MATERIALS, INC.

Inventor： BEN-LI SHEU ,  BENCHERKI MEBARKI ,  JOUNG JOO LEE ,  ISMAIL EMESH ,  ROEY SHAVIV ,  XIANMIN TANG

IPC: H01L21/027 ,  H01L21/768 ,  C23C16/455 ,  H01L21/285 ,  H01L21/02

Abstract: Methods and apparatus for asymmetric deposition of a material on a structure formed on a substrate are provided herein. In some embodiments, a method for asymmetric deposition of a material includes forming a plasma from a process gas comprising ionized fluorocarbon (CxFy) particles, depositing an asymmetric fluorocarbon (CxFy) polymer coating on a first sidewall and a bottom portion of an opening formed in a first dielectric layer using angled CxFy ions, depositing a metal, metallic nitride, or metallic oxide on a second sidewall of the opening, and removing the CxFy polymer coating from the first sidewall and the bottom portion of the opening to leave an asymmetric deposition of the metal, metallic nitride, or metallic oxide on the structure.