公开(公告)号：US20210238745A1

公开(公告)日：2021-08-05

申请号：US16786292

申请日：2020-02-10

Applicant: APPLIED MATERIALS, INC.

Inventor： TIMOTHY JOSEPH FRANKLIN ,  JOSEPH F. SOMMERS ,  CARLATON WONG ,  REYN WAKABAYASHI ,  JOSEPH FREDERICK BEHNKE

IPC: C23C16/455

Abstract: A showerhead assembly, and method of forming thereof is provided. The apparatus, for example, includes a gas distribution plate comprising an inner portion and an outer portion, the inner portion made from single crystal silicon (Si) and the outer portion made from one of single crystal Si or polysilicon (poly-Si); a connector having a circular configuration and formed from silicon (Si) and silicon carbide (SiC) as a major component thereof, wherein the connector is bonded to at least one of the inner portion and outer portion of the gas distribution plate; and a backing plate configured to connect to the gas distribution plate via the connector.