公开(公告)号：US20210238746A1

公开(公告)日：2021-08-05

申请号：US16823898

申请日：2020-03-19

Applicant: APPLIED MATERIALS, INC.

Inventor： TIMOTHY JOSEPH FRANKLIN ,  JOSEPH F. SOMMERS ,  CARLATON WONG ,  REYN WAKABAYASHI ,  Joseph Frederick BEHNKE

IPC: C23C16/455

Abstract: A showerhead assembly, and method of forming thereof is provided. The apparatus, for example, includes a gas distribution plate comprising an inner portion and an outer portion, the inner portion made from single crystal silicon (Si) and the outer portion made from one of single crystal Si or polysilicon (poly-Si), wherein a bonding layer is provided on a back surface of at least one of the inner portion or outer portion; a backing plate formed from silicon (Si) and silicon carbide (SiC) as a major component thereof, wherein the backing plate is bonded to at least one of the back surface of at least one of the inner portion or outer portion of the gas distribution plate.

公开(公告)号：US20210238745A1

公开(公告)日：2021-08-05

申请号：US16786292

申请日：2020-02-10

Applicant: APPLIED MATERIALS, INC.

Inventor： TIMOTHY JOSEPH FRANKLIN ,  JOSEPH F. SOMMERS ,  CARLATON WONG ,  REYN WAKABAYASHI ,  JOSEPH FREDERICK BEHNKE

IPC: C23C16/455

Abstract: A showerhead assembly, and method of forming thereof is provided. The apparatus, for example, includes a gas distribution plate comprising an inner portion and an outer portion, the inner portion made from single crystal silicon (Si) and the outer portion made from one of single crystal Si or polysilicon (poly-Si); a connector having a circular configuration and formed from silicon (Si) and silicon carbide (SiC) as a major component thereof, wherein the connector is bonded to at least one of the inner portion and outer portion of the gas distribution plate; and a backing plate configured to connect to the gas distribution plate via the connector.

公开(公告)号：US20210238744A1

公开(公告)日：2021-08-05

申请号：US16780855

申请日：2020-02-03

Applicant: APPLIED MATERIALS, INC.

Inventor： TIMOTHY JOSEPH FRANKLIN ,  JOSEPH F. SOMMERS ,  CARLATON WONG ,  REYN WAKABAYASHI

IPC: C23C16/455 ,  H01J37/32

Abstract: A showerhead assembly, and method of forming thereof is provided. The apparatus, for example, includes a gas distribution plate comprising an inner portion and an outer portion, the inner portion made from single crystal silicon (Si) and the outer portion made from one of single crystal Si or polysilicon (poly-Si); a first ring body formed from silicon (Si) and silicon carbide (SiC) as a major component thereof, wherein the first ring body is bonded to and extends from one of the inner portion or outer portion of the gas distribution plate; and a backing plate configured to connect to the gas distribution plate via the first ring body.

公开(公告)号：US20170213705A1

公开(公告)日：2017-07-27

申请号：US15414555

申请日：2017-01-24

Applicant: APPLIED MATERIALS, INC.

Inventor： OFER AMIR ,  JENNIFER Y. SUN ,  MICHAEL R. RICE ,  MICHAEL C. KUCHAR ,  JOSEPH F. SOMMERS

IPC: H01J37/32 ,  B08B3/12 ,  H01L21/67

CPC classification number: H01J37/32477 ,  B08B3/12 ,  H01J37/32091 ,  H01J37/32853 ,  H01L21/67126

Abstract: Slit valve gates and methods for cleaning are provided. Slit valves include: a slit valve gate configured to seal an opening of a process chamber, the slit valve gate comprising a surface that faces an processing volume of the process chamber; and a non-porous anodized coating on the surface of the slit valve gate. Methods of cleaning include: immersing the slit valve gate in a tank comprising deionized water; sonicating the slit valve gate at a first power density of about 6 W/cm2 to about 15 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a first period of time; sonicating the slit valve gate at a second power density of about 30 W/cm2 to about 45 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a second period of time; and removing the slit valve gate from the tank.