公开(公告)号：US20200185247A1

公开(公告)日：2020-06-11

申请号：US16213816

申请日：2018-12-07

Applicant: APPLIED MATERIALS, INC.

Inventor： BONNIE T CHIA ,  ROSS MARSHALL ,  TOMOHARU MATSUSHITA ,  CHENG-HSIUNG TSAI

IPC: H01L21/683 ,  H01L21/67

Abstract: Embodiments of an electrostatic chuck are provided herein. In some embodiments an electrostatic chuck includes an electrode, a dielectric body having a disk shape and covering the electrode, the dielectric body including a central region and a peripheral region, and the dielectric body including a lower surface having a central opening and an upper surface having a first opening in the central region and a plurality of second openings in the peripheral region, wherein the upper surface includes a plurality of protrusions and a diameter of each of the plurality of second openings is greater than 25.0 mils, and gas distribution channels that extend from the lower surface to the upper surface to define a plenum within the dielectric body.